JPS6242374B2 - - Google Patents
Info
- Publication number
- JPS6242374B2 JPS6242374B2 JP56164803A JP16480381A JPS6242374B2 JP S6242374 B2 JPS6242374 B2 JP S6242374B2 JP 56164803 A JP56164803 A JP 56164803A JP 16480381 A JP16480381 A JP 16480381A JP S6242374 B2 JPS6242374 B2 JP S6242374B2
- Authority
- JP
- Japan
- Prior art keywords
- cleaning liquid
- cleaning
- liquid introduction
- opening area
- water
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- H10P72/0416—
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Cleaning Or Drying Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56164803A JPS5866333A (ja) | 1981-10-14 | 1981-10-14 | 洗浄槽 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP56164803A JPS5866333A (ja) | 1981-10-14 | 1981-10-14 | 洗浄槽 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5866333A JPS5866333A (ja) | 1983-04-20 |
| JPS6242374B2 true JPS6242374B2 (OSRAM) | 1987-09-08 |
Family
ID=15800215
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP56164803A Granted JPS5866333A (ja) | 1981-10-14 | 1981-10-14 | 洗浄槽 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5866333A (OSRAM) |
Families Citing this family (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3110218B2 (ja) * | 1992-09-25 | 2000-11-20 | 三菱電機株式会社 | 半導体洗浄装置及び方法、ウエハカセット、専用グローブ並びにウエハ受け治具 |
| US5503171A (en) * | 1992-12-26 | 1996-04-02 | Tokyo Electron Limited | Substrates-washing apparatus |
| JP3320640B2 (ja) * | 1997-07-23 | 2002-09-03 | 東京エレクトロン株式会社 | 洗浄装置 |
| JPH1154471A (ja) | 1997-08-05 | 1999-02-26 | Tokyo Electron Ltd | 処理装置及び処理方法 |
| US6115867A (en) * | 1997-08-18 | 2000-09-12 | Tokyo Electron Limited | Apparatus for cleaning both sides of substrate |
| US6539963B1 (en) * | 1999-07-14 | 2003-04-01 | Micron Technology, Inc. | Pressurized liquid diffuser |
-
1981
- 1981-10-14 JP JP56164803A patent/JPS5866333A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5866333A (ja) | 1983-04-20 |
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