JPS6236396B2 - - Google Patents

Info

Publication number
JPS6236396B2
JPS6236396B2 JP53125574A JP12557478A JPS6236396B2 JP S6236396 B2 JPS6236396 B2 JP S6236396B2 JP 53125574 A JP53125574 A JP 53125574A JP 12557478 A JP12557478 A JP 12557478A JP S6236396 B2 JPS6236396 B2 JP S6236396B2
Authority
JP
Japan
Prior art keywords
resistor
polycrystalline silicon
resistance value
layer resistance
resistors
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP53125574A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5552252A (en
Inventor
Kenjiro Mitake
Takashi Okuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Electric Co Ltd filed Critical Nippon Electric Co Ltd
Priority to JP12557478A priority Critical patent/JPS5552252A/ja
Publication of JPS5552252A publication Critical patent/JPS5552252A/ja
Publication of JPS6236396B2 publication Critical patent/JPS6236396B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D88/00—Three-dimensional [3D] integrated devices

Landscapes

  • Semiconductor Integrated Circuits (AREA)
JP12557478A 1978-10-11 1978-10-11 Semiconductor integrated circuit device and manufacturing of them Granted JPS5552252A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12557478A JPS5552252A (en) 1978-10-11 1978-10-11 Semiconductor integrated circuit device and manufacturing of them

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12557478A JPS5552252A (en) 1978-10-11 1978-10-11 Semiconductor integrated circuit device and manufacturing of them

Publications (2)

Publication Number Publication Date
JPS5552252A JPS5552252A (en) 1980-04-16
JPS6236396B2 true JPS6236396B2 (enrdf_load_stackoverflow) 1987-08-06

Family

ID=14913543

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12557478A Granted JPS5552252A (en) 1978-10-11 1978-10-11 Semiconductor integrated circuit device and manufacturing of them

Country Status (1)

Country Link
JP (1) JPS5552252A (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS629662A (ja) * 1985-07-06 1987-01-17 Toshiba Corp 半導体装置及びその製造方法
JP3404064B2 (ja) 1993-03-09 2003-05-06 株式会社日立製作所 半導体装置及びその製造方法
US9704944B2 (en) 2013-02-28 2017-07-11 Texas Instruments Deutschland Gmbh Three precision resistors of different sheet resistance at same level

Also Published As

Publication number Publication date
JPS5552252A (en) 1980-04-16

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