JPS5552252A - Semiconductor integrated circuit device and manufacturing of them - Google Patents

Semiconductor integrated circuit device and manufacturing of them

Info

Publication number
JPS5552252A
JPS5552252A JP12557478A JP12557478A JPS5552252A JP S5552252 A JPS5552252 A JP S5552252A JP 12557478 A JP12557478 A JP 12557478A JP 12557478 A JP12557478 A JP 12557478A JP S5552252 A JPS5552252 A JP S5552252A
Authority
JP
Japan
Prior art keywords
film
resistor
resistors
crystal silicon
oxide films
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12557478A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6236396B2 (enrdf_load_stackoverflow
Inventor
Kenjirou Mitake
Takashi Okuda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
NEC Corp
Original Assignee
NEC Corp
Nippon Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by NEC Corp, Nippon Electric Co Ltd filed Critical NEC Corp
Priority to JP12557478A priority Critical patent/JPS5552252A/ja
Publication of JPS5552252A publication Critical patent/JPS5552252A/ja
Publication of JPS6236396B2 publication Critical patent/JPS6236396B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10D—INORGANIC ELECTRIC SEMICONDUCTOR DEVICES
    • H10D88/00—Three-dimensional [3D] integrated devices

Landscapes

  • Semiconductor Integrated Circuits (AREA)
JP12557478A 1978-10-11 1978-10-11 Semiconductor integrated circuit device and manufacturing of them Granted JPS5552252A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12557478A JPS5552252A (en) 1978-10-11 1978-10-11 Semiconductor integrated circuit device and manufacturing of them

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12557478A JPS5552252A (en) 1978-10-11 1978-10-11 Semiconductor integrated circuit device and manufacturing of them

Publications (2)

Publication Number Publication Date
JPS5552252A true JPS5552252A (en) 1980-04-16
JPS6236396B2 JPS6236396B2 (enrdf_load_stackoverflow) 1987-08-06

Family

ID=14913543

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12557478A Granted JPS5552252A (en) 1978-10-11 1978-10-11 Semiconductor integrated circuit device and manufacturing of them

Country Status (1)

Country Link
JP (1) JPS5552252A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS629662A (ja) * 1985-07-06 1987-01-17 Toshiba Corp 半導体装置及びその製造方法
US6133094A (en) * 1993-03-09 2000-10-17 Hitachi Ltd Semiconductor device and process of producing the same
EP2989661A4 (en) * 2013-02-28 2017-02-15 Texas Instruments Incorporated Integrated circuit with same level different resistors

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS629662A (ja) * 1985-07-06 1987-01-17 Toshiba Corp 半導体装置及びその製造方法
US6133094A (en) * 1993-03-09 2000-10-17 Hitachi Ltd Semiconductor device and process of producing the same
US6524924B1 (en) 1993-03-09 2003-02-25 Hitachi, Ltd. Semiconductor device and process of producing the same
US6610569B1 (en) 1993-03-09 2003-08-26 Hitachi, Ltd. Semiconductor device and process of producing the same
US6835632B2 (en) 1993-03-09 2004-12-28 Hitachi, Ltd. Semiconductor device and process of producing the same
US7238582B2 (en) 1993-03-09 2007-07-03 Hitachi, Ltd. Semiconductor device and process of producing the same
EP2989661A4 (en) * 2013-02-28 2017-02-15 Texas Instruments Incorporated Integrated circuit with same level different resistors
US9704944B2 (en) 2013-02-28 2017-07-11 Texas Instruments Deutschland Gmbh Three precision resistors of different sheet resistance at same level

Also Published As

Publication number Publication date
JPS6236396B2 (enrdf_load_stackoverflow) 1987-08-06

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