JPS623385B2 - - Google Patents
Info
- Publication number
- JPS623385B2 JPS623385B2 JP51011985A JP1198576A JPS623385B2 JP S623385 B2 JPS623385 B2 JP S623385B2 JP 51011985 A JP51011985 A JP 51011985A JP 1198576 A JP1198576 A JP 1198576A JP S623385 B2 JPS623385 B2 JP S623385B2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- probe
- transistor
- center conductor
- ground
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000004020 conductor Substances 0.000 claims description 20
- 239000000523 sample Substances 0.000 claims description 18
- 238000000034 method Methods 0.000 claims description 8
- 238000005259 measurement Methods 0.000 description 17
- 235000012431 wafers Nutrition 0.000 description 15
- 230000005672 electromagnetic field Effects 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000005540 biological transmission Effects 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000004904 shortening Methods 0.000 description 1
- 230000008054 signal transmission Effects 0.000 description 1
Landscapes
- Testing Of Individual Semiconductor Devices (AREA)
- Measuring Leads Or Probes (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1198576A JPS5295182A (en) | 1976-02-06 | 1976-02-06 | Measurement for high frequency characteristics of transistor wafer |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1198576A JPS5295182A (en) | 1976-02-06 | 1976-02-06 | Measurement for high frequency characteristics of transistor wafer |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5295182A JPS5295182A (en) | 1977-08-10 |
JPS623385B2 true JPS623385B2 (fr) | 1987-01-24 |
Family
ID=11792877
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1198576A Granted JPS5295182A (en) | 1976-02-06 | 1976-02-06 | Measurement for high frequency characteristics of transistor wafer |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5295182A (fr) |
Families Citing this family (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US4697143A (en) * | 1984-04-30 | 1987-09-29 | Cascade Microtech, Inc. | Wafer probe |
JPS6221068A (ja) * | 1985-07-19 | 1987-01-29 | Koichi Yoshida | フラツト形探針 |
FR2592176B1 (fr) * | 1985-12-20 | 1988-02-12 | Labo Electronique Physique | Dispositif de test pour boitier sans broches muni d'une pastille de circuit integre hyperfrequences |
FR2592175B1 (fr) * | 1985-12-20 | 1988-02-12 | Labo Electronique Physique | Dispositif de test pour pastille de circuit integre hyperfrequences |
JPS62177455A (ja) * | 1986-01-31 | 1987-08-04 | Tanaka Kikinzoku Kogyo Kk | 半導体ウエ−ハの電気的特性測定用プロ−ブ針 |
JPH0690222B2 (ja) * | 1986-01-31 | 1994-11-14 | 田中貴金属工業株式会社 | 半導体ウエ−ハの電気的特性測定用プロ−ブ針 |
JPH0740577B2 (ja) * | 1987-04-21 | 1995-05-01 | 東京エレクトロン株式会社 | プロ−ブカ−ド |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS516678A (fr) * | 1974-06-28 | 1976-01-20 | Ibm |
-
1976
- 1976-02-06 JP JP1198576A patent/JPS5295182A/ja active Granted
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS516678A (fr) * | 1974-06-28 | 1976-01-20 | Ibm |
Also Published As
Publication number | Publication date |
---|---|
JPS5295182A (en) | 1977-08-10 |
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