JPS5295182A - Measurement for high frequency characteristics of transistor wafer - Google Patents

Measurement for high frequency characteristics of transistor wafer

Info

Publication number
JPS5295182A
JPS5295182A JP1198576A JP1198576A JPS5295182A JP S5295182 A JPS5295182 A JP S5295182A JP 1198576 A JP1198576 A JP 1198576A JP 1198576 A JP1198576 A JP 1198576A JP S5295182 A JPS5295182 A JP S5295182A
Authority
JP
Japan
Prior art keywords
high frequency
measurement
frequency characteristics
transistor wafer
wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1198576A
Other languages
Japanese (ja)
Other versions
JPS623385B2 (en
Inventor
Junichi Yoshida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nippon Telegraph and Telephone Corp
Original Assignee
Nippon Telegraph and Telephone Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nippon Telegraph and Telephone Corp filed Critical Nippon Telegraph and Telephone Corp
Priority to JP1198576A priority Critical patent/JPS5295182A/en
Publication of JPS5295182A publication Critical patent/JPS5295182A/en
Publication of JPS623385B2 publication Critical patent/JPS623385B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Testing Or Measuring Of Semiconductors Or The Like (AREA)
  • Testing Of Individual Semiconductor Devices (AREA)
  • Measuring Leads Or Probes (AREA)

Abstract

PURPOSE: To improve the high frequency characteristic of the measurement instrument to measure precisely at 10 MHz to 1 GHz by forming the measurement instrument providing 0.5 mm short prove on the point by use of coplaner guide and by providing the grounded electrode separately on the transister wafer to eliminate the out of phase.
COPYRIGHT: (C)1977,JPO&Japio
JP1198576A 1976-02-06 1976-02-06 Measurement for high frequency characteristics of transistor wafer Granted JPS5295182A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1198576A JPS5295182A (en) 1976-02-06 1976-02-06 Measurement for high frequency characteristics of transistor wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1198576A JPS5295182A (en) 1976-02-06 1976-02-06 Measurement for high frequency characteristics of transistor wafer

Publications (2)

Publication Number Publication Date
JPS5295182A true JPS5295182A (en) 1977-08-10
JPS623385B2 JPS623385B2 (en) 1987-01-24

Family

ID=11792877

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1198576A Granted JPS5295182A (en) 1976-02-06 1976-02-06 Measurement for high frequency characteristics of transistor wafer

Country Status (1)

Country Link
JP (1) JPS5295182A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60236241A (en) * 1984-04-30 1985-11-25 カスケード・マイクロテツク・インコーポレイテツド Wafer probe
JPS6221068A (en) * 1985-07-19 1987-01-29 Koichi Yoshida Flat-type probe
JPS62151772A (en) * 1985-12-20 1987-07-06 フィリップス　エレクトロニクス　ネムローゼ　フェンノートシャップ Test apparatus for high-frequency integrated circuit
JPS62163984A (en) * 1985-12-20 1987-07-20 エヌ・ベ−・フイリツプス・フル−イランペンフアブリケン Inspection device
JPS62177456A (en) * 1986-01-31 1987-08-04 Tanaka Kikinzoku Kogyo Kk Probe stylus for measuring electric characteristic of semiconductor wafer
JPS62177455A (en) * 1986-01-31 1987-08-04 Tanaka Kikinzoku Kogyo Kk Probe stylus for measuring electric characteristics of semiconductor wafer
JPS63262849A (en) * 1987-04-21 1988-10-31 Tokyo Electron Ltd Probe card

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS516678A (en) * 1974-06-28 1976-01-20 Ibm

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS516678A (en) * 1974-06-28 1976-01-20 Ibm

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60236241A (en) * 1984-04-30 1985-11-25 カスケード・マイクロテツク・インコーポレイテツド Wafer probe
JPS6221068A (en) * 1985-07-19 1987-01-29 Koichi Yoshida Flat-type probe
JPS62151772A (en) * 1985-12-20 1987-07-06 フィリップス　エレクトロニクス　ネムローゼ　フェンノートシャップ Test apparatus for high-frequency integrated circuit
JPS62163984A (en) * 1985-12-20 1987-07-20 エヌ・ベ−・フイリツプス・フル−イランペンフアブリケン Inspection device
JPS62177456A (en) * 1986-01-31 1987-08-04 Tanaka Kikinzoku Kogyo Kk Probe stylus for measuring electric characteristic of semiconductor wafer
JPS62177455A (en) * 1986-01-31 1987-08-04 Tanaka Kikinzoku Kogyo Kk Probe stylus for measuring electric characteristics of semiconductor wafer
JPS63262849A (en) * 1987-04-21 1988-10-31 Tokyo Electron Ltd Probe card

Also Published As

Publication number Publication date
JPS623385B2 (en) 1987-01-24

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