JPS6227155B2 - - Google Patents

Info

Publication number
JPS6227155B2
JPS6227155B2 JP54109125A JP10912579A JPS6227155B2 JP S6227155 B2 JPS6227155 B2 JP S6227155B2 JP 54109125 A JP54109125 A JP 54109125A JP 10912579 A JP10912579 A JP 10912579A JP S6227155 B2 JPS6227155 B2 JP S6227155B2
Authority
JP
Japan
Prior art keywords
wiring
film
photoresist
dry etching
aluminum
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP54109125A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5635774A (en
Inventor
Katsumi Ogiue
Yoshinori Kureishi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Original Assignee
CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by CHO ERU ESU AI GIJUTSU KENKYU KUMIAI filed Critical CHO ERU ESU AI GIJUTSU KENKYU KUMIAI
Priority to JP10912579A priority Critical patent/JPS5635774A/ja
Publication of JPS5635774A publication Critical patent/JPS5635774A/ja
Publication of JPS6227155B2 publication Critical patent/JPS6227155B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Manufacturing Of Printed Circuit Boards (AREA)
  • Drying Of Semiconductors (AREA)
JP10912579A 1979-08-29 1979-08-29 Dry etching method Granted JPS5635774A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10912579A JPS5635774A (en) 1979-08-29 1979-08-29 Dry etching method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10912579A JPS5635774A (en) 1979-08-29 1979-08-29 Dry etching method

Publications (2)

Publication Number Publication Date
JPS5635774A JPS5635774A (en) 1981-04-08
JPS6227155B2 true JPS6227155B2 (enrdf_load_stackoverflow) 1987-06-12

Family

ID=14502188

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10912579A Granted JPS5635774A (en) 1979-08-29 1979-08-29 Dry etching method

Country Status (1)

Country Link
JP (1) JPS5635774A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0522899A (ja) * 1991-07-10 1993-01-29 Akiko Uchiumi 自動車のタイヤの回転により電気を作る方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6031909B2 (ja) * 1977-08-17 1985-07-25 株式会社日立製作所 エツチング加工法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0522899A (ja) * 1991-07-10 1993-01-29 Akiko Uchiumi 自動車のタイヤの回転により電気を作る方法

Also Published As

Publication number Publication date
JPS5635774A (en) 1981-04-08

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