JPS62222906A - ウエ−ハ搬送機構 - Google Patents

ウエ−ハ搬送機構

Info

Publication number
JPS62222906A
JPS62222906A JP6663986A JP6663986A JPS62222906A JP S62222906 A JPS62222906 A JP S62222906A JP 6663986 A JP6663986 A JP 6663986A JP 6663986 A JP6663986 A JP 6663986A JP S62222906 A JPS62222906 A JP S62222906A
Authority
JP
Japan
Prior art keywords
arm
wafer
pulley
turntable
connecting arm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6663986A
Other languages
English (en)
Japanese (ja)
Other versions
JPH037574B2 (enrdf_load_stackoverflow
Inventor
Tsutomu Nakadai
勉 中台
Tsutomu Hongo
本郷　勉
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi High Tech Corp
Original Assignee
Hitachi Electronics Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Electronics Engineering Co Ltd filed Critical Hitachi Electronics Engineering Co Ltd
Priority to JP6663986A priority Critical patent/JPS62222906A/ja
Publication of JPS62222906A publication Critical patent/JPS62222906A/ja
Publication of JPH037574B2 publication Critical patent/JPH037574B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25J—MANIPULATORS; CHAMBERS PROVIDED WITH MANIPULATION DEVICES
    • B25J9/00—Programme-controlled manipulators
    • B25J9/02—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type
    • B25J9/04—Programme-controlled manipulators characterised by movement of the arms, e.g. cartesian coordinate type by rotating at least one arm, excluding the head movement itself, e.g. cylindrical coordinate type or polar coordinate type
    • B25J9/041—Cylindrical coordinate type
    • B25J9/042—Cylindrical coordinate type comprising an articulated arm

Landscapes

  • Engineering & Computer Science (AREA)
  • Robotics (AREA)
  • Mechanical Engineering (AREA)
  • Warehouses Or Storage Devices (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP6663986A 1986-03-25 1986-03-25 ウエ−ハ搬送機構 Granted JPS62222906A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6663986A JPS62222906A (ja) 1986-03-25 1986-03-25 ウエ−ハ搬送機構

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6663986A JPS62222906A (ja) 1986-03-25 1986-03-25 ウエ−ハ搬送機構

Publications (2)

Publication Number Publication Date
JPS62222906A true JPS62222906A (ja) 1987-09-30
JPH037574B2 JPH037574B2 (enrdf_load_stackoverflow) 1991-02-01

Family

ID=13321669

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6663986A Granted JPS62222906A (ja) 1986-03-25 1986-03-25 ウエ−ハ搬送機構

Country Status (1)

Country Link
JP (1) JPS62222906A (enrdf_load_stackoverflow)

Cited By (17)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6426186U (enrdf_load_stackoverflow) * 1987-08-06 1989-02-14
JPH0239548A (ja) * 1988-07-29 1990-02-08 Hitachi Electron Eng Co Ltd ウェハ・ハンドリングチャック構造
JPH02132840A (ja) * 1988-02-12 1990-05-22 Tokyo Electron Ltd 処理装置及びレジスト処理装置及び処理方法及びレジスト処理方法
US5083896A (en) * 1988-09-16 1992-01-28 Tokyo Ohka Kogyo Co., Ltd. Object handling device
JPH0430447A (ja) * 1990-05-25 1992-02-03 Matsushita Electric Ind Co Ltd 基板の移し換え装置
JPH0536809A (ja) * 1991-07-31 1993-02-12 Mitsubishi Electric Corp 半導体基板処理装置に於ける半導体基板搬送アーム
JPH05190643A (ja) * 1991-12-26 1993-07-30 Dainippon Screen Mfg Co Ltd 基板処理装置
JPH05226453A (ja) * 1992-02-17 1993-09-03 Hitachi Ltd 真空処理装置
JPH05294410A (ja) * 1992-04-21 1993-11-09 Daifuku Co Ltd 荷保管設備
JPH0851138A (ja) * 1994-06-23 1996-02-20 Hyundai Electron Ind Co Ltd 多重基板伝達装置
JPH08227929A (ja) * 1988-02-12 1996-09-03 Tokyo Electron Ltd 処理装置
JPH08274140A (ja) * 1993-05-26 1996-10-18 Rootsue Kk 基板搬送用スカラ型ロボット
JPH0969549A (ja) * 1995-08-31 1997-03-11 Shibaura Eng Works Co Ltd ロ−デイング装置
JPH09186218A (ja) * 1995-12-28 1997-07-15 Jenoptik Ag ウェハ状物体の取扱い装置
US6287067B1 (en) 1996-06-21 2001-09-11 Tokyo Ohka Kogyo Co., Ltd. Processing unit and processing unit structure by assembling thereof
WO2007128726A1 (de) * 2006-05-05 2007-11-15 Thyssenkrupp Drauz Nothelfer Gmbh Vorrichtung zum bearbeiten von bauteilen, insbesondere einer kraftfahrzeugkarosserie
US8127415B2 (en) 2006-05-05 2012-03-06 Thyssenkrupp Drauz Nothelfer Gmbh Device for machining components, in particular of a vehicle body

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5917258A (ja) * 1982-07-20 1984-01-28 Toshiba Corp 自動ウエハ試験装置
JPS6094286A (ja) * 1983-10-28 1985-05-27 株式会社日立製作所 ウエハ搬送装置
JPS60135192A (ja) * 1983-12-23 1985-07-18 名古屋機工株式会社 搬送装置
JPS60204506A (ja) * 1984-03-30 1985-10-16 Hitachi Electronics Eng Co Ltd 基板の搬出・搬入装置
JPS6138882A (ja) * 1984-07-31 1986-02-24 ぺんてる株式会社 ダブルア−ム型ロボツト

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5917258A (ja) * 1982-07-20 1984-01-28 Toshiba Corp 自動ウエハ試験装置
JPS6094286A (ja) * 1983-10-28 1985-05-27 株式会社日立製作所 ウエハ搬送装置
JPS60135192A (ja) * 1983-12-23 1985-07-18 名古屋機工株式会社 搬送装置
JPS60204506A (ja) * 1984-03-30 1985-10-16 Hitachi Electronics Eng Co Ltd 基板の搬出・搬入装置
JPS6138882A (ja) * 1984-07-31 1986-02-24 ぺんてる株式会社 ダブルア−ム型ロボツト

Cited By (20)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6426186U (enrdf_load_stackoverflow) * 1987-08-06 1989-02-14
JPH08227929A (ja) * 1988-02-12 1996-09-03 Tokyo Electron Ltd 処理装置
JPH02132840A (ja) * 1988-02-12 1990-05-22 Tokyo Electron Ltd 処理装置及びレジスト処理装置及び処理方法及びレジスト処理方法
JPH0239548A (ja) * 1988-07-29 1990-02-08 Hitachi Electron Eng Co Ltd ウェハ・ハンドリングチャック構造
US5083896A (en) * 1988-09-16 1992-01-28 Tokyo Ohka Kogyo Co., Ltd. Object handling device
JPH0430447A (ja) * 1990-05-25 1992-02-03 Matsushita Electric Ind Co Ltd 基板の移し換え装置
JPH0536809A (ja) * 1991-07-31 1993-02-12 Mitsubishi Electric Corp 半導体基板処理装置に於ける半導体基板搬送アーム
JPH05190643A (ja) * 1991-12-26 1993-07-30 Dainippon Screen Mfg Co Ltd 基板処理装置
JPH05226453A (ja) * 1992-02-17 1993-09-03 Hitachi Ltd 真空処理装置
JPH05294410A (ja) * 1992-04-21 1993-11-09 Daifuku Co Ltd 荷保管設備
JPH08274140A (ja) * 1993-05-26 1996-10-18 Rootsue Kk 基板搬送用スカラ型ロボット
JPH0851138A (ja) * 1994-06-23 1996-02-20 Hyundai Electron Ind Co Ltd 多重基板伝達装置
JPH0969549A (ja) * 1995-08-31 1997-03-11 Shibaura Eng Works Co Ltd ロ−デイング装置
JPH09186218A (ja) * 1995-12-28 1997-07-15 Jenoptik Ag ウェハ状物体の取扱い装置
US6287067B1 (en) 1996-06-21 2001-09-11 Tokyo Ohka Kogyo Co., Ltd. Processing unit and processing unit structure by assembling thereof
WO2007128726A1 (de) * 2006-05-05 2007-11-15 Thyssenkrupp Drauz Nothelfer Gmbh Vorrichtung zum bearbeiten von bauteilen, insbesondere einer kraftfahrzeugkarosserie
CN101437648B (zh) 2006-05-05 2011-06-15 蒂森克虏伯·德劳茨·诺帮有限责任公司 用于加工部件、尤其是车身部件的装置
US8127415B2 (en) 2006-05-05 2012-03-06 Thyssenkrupp Drauz Nothelfer Gmbh Device for machining components, in particular of a vehicle body
US8132306B2 (en) 2006-05-05 2012-03-13 Thyssenkrupp Drauz Nothelfer Gmbh Device for machining components, in particular of a vehicle body
KR101371576B1 (ko) * 2006-05-05 2014-03-10 티센크루프 드라우츠 노텔퍼 게엠베하 부품 가공 장치

Also Published As

Publication number Publication date
JPH037574B2 (enrdf_load_stackoverflow) 1991-02-01

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