JPS62200722A - 半導体拡散炉用部材 - Google Patents

半導体拡散炉用部材

Info

Publication number
JPS62200722A
JPS62200722A JP61043658A JP4365886A JPS62200722A JP S62200722 A JPS62200722 A JP S62200722A JP 61043658 A JP61043658 A JP 61043658A JP 4365886 A JP4365886 A JP 4365886A JP S62200722 A JPS62200722 A JP S62200722A
Authority
JP
Japan
Prior art keywords
silicon carbide
film
cylinder
cvd
diffusion furnace
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61043658A
Other languages
English (en)
Japanese (ja)
Other versions
JPH044748B2 (enExample
Inventor
Makoto Ebata
江端　誠
Miharu Kayane
茅根　美治
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Engineering and Shipbuilding Co Ltd
Original Assignee
Mitsui Engineering and Shipbuilding Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Engineering and Shipbuilding Co Ltd filed Critical Mitsui Engineering and Shipbuilding Co Ltd
Priority to JP61043658A priority Critical patent/JPS62200722A/ja
Publication of JPS62200722A publication Critical patent/JPS62200722A/ja
Publication of JPH044748B2 publication Critical patent/JPH044748B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP61043658A 1986-02-28 1986-02-28 半導体拡散炉用部材 Granted JPS62200722A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61043658A JPS62200722A (ja) 1986-02-28 1986-02-28 半導体拡散炉用部材

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61043658A JPS62200722A (ja) 1986-02-28 1986-02-28 半導体拡散炉用部材

Publications (2)

Publication Number Publication Date
JPS62200722A true JPS62200722A (ja) 1987-09-04
JPH044748B2 JPH044748B2 (enExample) 1992-01-29

Family

ID=12669954

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61043658A Granted JPS62200722A (ja) 1986-02-28 1986-02-28 半導体拡散炉用部材

Country Status (1)

Country Link
JP (1) JPS62200722A (enExample)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0488656A (ja) * 1990-07-31 1992-03-23 Ibiden Co Ltd 黒鉛製ウエハ保持治具
JPH04345020A (ja) * 1991-05-22 1992-12-01 Hitachi Chem Co Ltd 熱処理用ホットプレート
JPWO2002060834A1 (ja) * 2001-02-01 2004-06-03 旭硝子株式会社 高純度セラミックス部品の接合方法
US7055236B2 (en) 1999-08-13 2006-06-06 Asahi Glass Company, Limited Joining method for high-purity ceramic parts
JP2014205590A (ja) * 2013-04-12 2014-10-30 イビデン株式会社 セラミックス接合体、耐熱部品及びセラミックス接合体の製造方法

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0488656A (ja) * 1990-07-31 1992-03-23 Ibiden Co Ltd 黒鉛製ウエハ保持治具
JPH04345020A (ja) * 1991-05-22 1992-12-01 Hitachi Chem Co Ltd 熱処理用ホットプレート
US7055236B2 (en) 1999-08-13 2006-06-06 Asahi Glass Company, Limited Joining method for high-purity ceramic parts
JPWO2002060834A1 (ja) * 2001-02-01 2004-06-03 旭硝子株式会社 高純度セラミックス部品の接合方法
EP1357098A4 (en) * 2001-02-01 2005-01-12 Asahi Glass Co Ltd CONNECTION METHOD FOR HIGH-PURITY CERAMIC PARTS
JP2014205590A (ja) * 2013-04-12 2014-10-30 イビデン株式会社 セラミックス接合体、耐熱部品及びセラミックス接合体の製造方法

Also Published As

Publication number Publication date
JPH044748B2 (enExample) 1992-01-29

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