JPH044748B2 - - Google Patents

Info

Publication number
JPH044748B2
JPH044748B2 JP61043658A JP4365886A JPH044748B2 JP H044748 B2 JPH044748 B2 JP H044748B2 JP 61043658 A JP61043658 A JP 61043658A JP 4365886 A JP4365886 A JP 4365886A JP H044748 B2 JPH044748 B2 JP H044748B2
Authority
JP
Japan
Prior art keywords
silicon carbide
tube
cvd
graphite
boat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP61043658A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62200722A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP61043658A priority Critical patent/JPS62200722A/ja
Publication of JPS62200722A publication Critical patent/JPS62200722A/ja
Publication of JPH044748B2 publication Critical patent/JPH044748B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP61043658A 1986-02-28 1986-02-28 半導体拡散炉用部材 Granted JPS62200722A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61043658A JPS62200722A (ja) 1986-02-28 1986-02-28 半導体拡散炉用部材

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61043658A JPS62200722A (ja) 1986-02-28 1986-02-28 半導体拡散炉用部材

Publications (2)

Publication Number Publication Date
JPS62200722A JPS62200722A (ja) 1987-09-04
JPH044748B2 true JPH044748B2 (enExample) 1992-01-29

Family

ID=12669954

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61043658A Granted JPS62200722A (ja) 1986-02-28 1986-02-28 半導体拡散炉用部材

Country Status (1)

Country Link
JP (1) JPS62200722A (enExample)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2719664B2 (ja) * 1990-07-31 1998-02-25 イビデン株式会社 黒鉛製ウエハ保持治具
JPH04345020A (ja) * 1991-05-22 1992-12-01 Hitachi Chem Co Ltd 熱処理用ホットプレート
JP2001048667A (ja) 1999-08-13 2001-02-20 Asahi Glass Co Ltd セラミックス部品の接合方法
JPWO2002060834A1 (ja) * 2001-02-01 2004-06-03 旭硝子株式会社 高純度セラミックス部品の接合方法
JP6081277B2 (ja) * 2013-04-12 2017-02-15 イビデン株式会社 セラミックス接合体、耐熱部品及びセラミックス接合体の製造方法

Also Published As

Publication number Publication date
JPS62200722A (ja) 1987-09-04

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