JPS62165317A - 半導体装置の製造方法 - Google Patents
半導体装置の製造方法Info
- Publication number
- JPS62165317A JPS62165317A JP626186A JP626186A JPS62165317A JP S62165317 A JPS62165317 A JP S62165317A JP 626186 A JP626186 A JP 626186A JP 626186 A JP626186 A JP 626186A JP S62165317 A JPS62165317 A JP S62165317A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- single crystal
- substrate
- gallium arsenide
- thickness
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims abstract description 23
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 11
- JBRZTFJDHDCESZ-UHFFFAOYSA-N AsGa Chemical compound [As]#[Ga] JBRZTFJDHDCESZ-UHFFFAOYSA-N 0.000 claims abstract description 47
- 229910001218 Gallium arsenide Inorganic materials 0.000 claims abstract description 46
- 239000000758 substrate Substances 0.000 claims abstract description 29
- 239000013078 crystal Substances 0.000 claims abstract description 27
- 238000000034 method Methods 0.000 claims abstract description 12
- 230000005533 two-dimensional electron gas Effects 0.000 claims abstract description 10
- 229910052785 arsenic Inorganic materials 0.000 claims abstract description 5
- RQNWIZPPADIBDY-UHFFFAOYSA-N arsenic atom Chemical compound [As] RQNWIZPPADIBDY-UHFFFAOYSA-N 0.000 claims abstract description 5
- 239000012535 impurity Substances 0.000 claims description 6
- FTWRSWRBSVXQPI-UHFFFAOYSA-N alumanylidynearsane;gallanylidynearsane Chemical compound [As]#[Al].[As]#[Ga] FTWRSWRBSVXQPI-UHFFFAOYSA-N 0.000 claims description 4
- 238000010438 heat treatment Methods 0.000 claims description 4
- 230000001678 irradiating effect Effects 0.000 claims description 4
- 238000005530 etching Methods 0.000 abstract description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 3
- 125000006850 spacer group Chemical group 0.000 abstract description 3
- 238000005238 degreasing Methods 0.000 abstract description 2
- 229910052710 silicon Inorganic materials 0.000 abstract description 2
- 239000010703 silicon Substances 0.000 abstract description 2
- GYHNNYVSQQEPJS-UHFFFAOYSA-N Gallium Chemical compound [Ga] GYHNNYVSQQEPJS-UHFFFAOYSA-N 0.000 abstract 1
- 229910052733 gallium Inorganic materials 0.000 abstract 1
- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 description 7
- 230000000694 effects Effects 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- 229910052799 carbon Inorganic materials 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 150000001875 compounds Chemical class 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000002253 acid Substances 0.000 description 1
- QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
- 238000005452 bending Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000969 carrier Substances 0.000 description 1
- 230000000052 comparative effect Effects 0.000 description 1
- 239000000356 contaminant Substances 0.000 description 1
- 238000002109 crystal growth method Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- 239000007789 gas Substances 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 229910052760 oxygen Inorganic materials 0.000 description 1
- 239000001301 oxygen Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 230000027756 respiratory electron transport chain Effects 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
- Junction Field-Effect Transistors (AREA)
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP626186A JPS62165317A (ja) | 1986-01-17 | 1986-01-17 | 半導体装置の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP626186A JPS62165317A (ja) | 1986-01-17 | 1986-01-17 | 半導体装置の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62165317A true JPS62165317A (ja) | 1987-07-21 |
| JPH022285B2 JPH022285B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-01-17 |
Family
ID=11633519
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP626186A Granted JPS62165317A (ja) | 1986-01-17 | 1986-01-17 | 半導体装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62165317A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01161874A (ja) * | 1987-12-18 | 1989-06-26 | Hitachi Ltd | 半導体装置とその製造方法 |
| JPH0412091A (ja) * | 1990-04-26 | 1992-01-16 | Nikko Kyodo Co Ltd | 半導体結晶のエピタキシャル成長方法 |
| CN102299175A (zh) * | 2011-08-29 | 2011-12-28 | 中国电子科技集团公司第十三研究所 | InAlN/GaN异质结有源区的埋层结构和激活方法 |
| CN102856373A (zh) * | 2012-09-29 | 2013-01-02 | 电子科技大学 | 高电子迁移率晶体管 |
-
1986
- 1986-01-17 JP JP626186A patent/JPS62165317A/ja active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01161874A (ja) * | 1987-12-18 | 1989-06-26 | Hitachi Ltd | 半導体装置とその製造方法 |
| JPH0412091A (ja) * | 1990-04-26 | 1992-01-16 | Nikko Kyodo Co Ltd | 半導体結晶のエピタキシャル成長方法 |
| CN102299175A (zh) * | 2011-08-29 | 2011-12-28 | 中国电子科技集团公司第十三研究所 | InAlN/GaN异质结有源区的埋层结构和激活方法 |
| CN102856373A (zh) * | 2012-09-29 | 2013-01-02 | 电子科技大学 | 高电子迁移率晶体管 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH022285B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1990-01-17 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |