JPS62159473A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS62159473A
JPS62159473A JP78386A JP78386A JPS62159473A JP S62159473 A JPS62159473 A JP S62159473A JP 78386 A JP78386 A JP 78386A JP 78386 A JP78386 A JP 78386A JP S62159473 A JPS62159473 A JP S62159473A
Authority
JP
Japan
Prior art keywords
film
electrode
forming
insulating film
gate electrode
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP78386A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0260213B2 (enrdf_load_stackoverflow
Inventor
Tsutomu Kiyono
勉 清野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP78386A priority Critical patent/JPS62159473A/ja
Publication of JPS62159473A publication Critical patent/JPS62159473A/ja
Publication of JPH0260213B2 publication Critical patent/JPH0260213B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Junction Field-Effect Transistors (AREA)
  • Electrodes Of Semiconductors (AREA)
JP78386A 1986-01-08 1986-01-08 半導体装置の製造方法 Granted JPS62159473A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP78386A JPS62159473A (ja) 1986-01-08 1986-01-08 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP78386A JPS62159473A (ja) 1986-01-08 1986-01-08 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS62159473A true JPS62159473A (ja) 1987-07-15
JPH0260213B2 JPH0260213B2 (enrdf_load_stackoverflow) 1990-12-14

Family

ID=11483294

Family Applications (1)

Application Number Title Priority Date Filing Date
JP78386A Granted JPS62159473A (ja) 1986-01-08 1986-01-08 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS62159473A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113421950A (zh) * 2021-06-21 2021-09-21 安徽华晟新能源科技有限公司 太阳能电池片的制造方法

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113421950A (zh) * 2021-06-21 2021-09-21 安徽华晟新能源科技有限公司 太阳能电池片的制造方法
CN113421950B (zh) * 2021-06-21 2023-04-28 安徽华晟新能源科技有限公司 太阳能电池片的制造方法

Also Published As

Publication number Publication date
JPH0260213B2 (enrdf_load_stackoverflow) 1990-12-14

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