JPH0260213B2 - - Google Patents

Info

Publication number
JPH0260213B2
JPH0260213B2 JP78386A JP78386A JPH0260213B2 JP H0260213 B2 JPH0260213 B2 JP H0260213B2 JP 78386 A JP78386 A JP 78386A JP 78386 A JP78386 A JP 78386A JP H0260213 B2 JPH0260213 B2 JP H0260213B2
Authority
JP
Japan
Prior art keywords
film
sio
insulating film
electrode
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP78386A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62159473A (ja
Inventor
Tsutomu Kyono
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP78386A priority Critical patent/JPS62159473A/ja
Publication of JPS62159473A publication Critical patent/JPS62159473A/ja
Publication of JPH0260213B2 publication Critical patent/JPH0260213B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Electrodes Of Semiconductors (AREA)
  • Junction Field-Effect Transistors (AREA)
JP78386A 1986-01-08 1986-01-08 半導体装置の製造方法 Granted JPS62159473A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP78386A JPS62159473A (ja) 1986-01-08 1986-01-08 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP78386A JPS62159473A (ja) 1986-01-08 1986-01-08 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS62159473A JPS62159473A (ja) 1987-07-15
JPH0260213B2 true JPH0260213B2 (enrdf_load_stackoverflow) 1990-12-14

Family

ID=11483294

Family Applications (1)

Application Number Title Priority Date Filing Date
JP78386A Granted JPS62159473A (ja) 1986-01-08 1986-01-08 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS62159473A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN113421950B (zh) * 2021-06-21 2023-04-28 安徽华晟新能源科技有限公司 太阳能电池片的制造方法

Also Published As

Publication number Publication date
JPS62159473A (ja) 1987-07-15

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