JPS62117507U - - Google Patents

Info

Publication number
JPS62117507U
JPS62117507U JP479186U JP479186U JPS62117507U JP S62117507 U JPS62117507 U JP S62117507U JP 479186 U JP479186 U JP 479186U JP 479186 U JP479186 U JP 479186U JP S62117507 U JPS62117507 U JP S62117507U
Authority
JP
Japan
Prior art keywords
electron beam
microscope
deflector
electron
points
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP479186U
Other languages
English (en)
Other versions
JPH0516491Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP479186U priority Critical patent/JPH0516491Y2/ja
Publication of JPS62117507U publication Critical patent/JPS62117507U/ja
Application granted granted Critical
Publication of JPH0516491Y2 publication Critical patent/JPH0516491Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)
  • Length Measuring Devices With Unspecified Measuring Means (AREA)

Description

【図面の簡単な説明】
第１図は本考案の一実施例を示す構成ブロツク
図、第２図は測長原理の説明図、第３図は偏向器
に与える矩形波電流パルス波形を示す図、第４図
は平面上の２点の測長原理の説明図である。 １…電子銃、２…電子レンズ、３…試料、４…
中間レンズ系、５…最終レンズ、６，６ｘ，６ｙ
…偏向器、７…螢光板、８…発振器、９ｘ，９ｙ
…増幅器、１０ｘ，１０ｙ…Ａ／Ｄ変換器、１１
…演算器、１２…倍率設定器、１３…表示器、１
４…レンズ電源。

Claims (1)

    【実用新案登録請求の範囲】
  1. 加速電源により加速された電子ビームを２次元
    方向に偏向させる偏向器を最終レンズの上方又は
    下方に設け、目的とする２点の位置が表示装置上
    に重なつて見えるように前記偏光器に矩形状の偏
    向信号を送り、その時の電子ビームの加速電圧、
    偏向信号の振幅及び顕微鏡倍率より２点間の距離
    を算出するようにした電子顕微鏡の測長器。
JP479186U 1986-01-16 1986-01-16 Expired - Lifetime JPH0516491Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP479186U JPH0516491Y2 (ja) 1986-01-16 1986-01-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP479186U JPH0516491Y2 (ja) 1986-01-16 1986-01-16

Publications (2)

Publication Number Publication Date
JPS62117507U true JPS62117507U (ja) 1987-07-25
JPH0516491Y2 JPH0516491Y2 (ja) 1993-04-30

Family

ID=30785780

Family Applications (1)

Application Number Title Priority Date Filing Date
JP479186U Expired - Lifetime JPH0516491Y2 (ja) 1986-01-16 1986-01-16

Country Status (1)

Country Link
JP (1) JPH0516491Y2 (ja)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6414854A (en) * 1987-07-08 1989-01-19 Nikon Corp Electron microscope for length measurement

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6414854A (en) * 1987-07-08 1989-01-19 Nikon Corp Electron microscope for length measurement

Also Published As

Publication number Publication date
JPH0516491Y2 (ja) 1993-04-30

Similar Documents

Publication Publication Date Title
JPS62117507U (ja)
US4039815A (en) Electro-optical correlator
SU999087A1 (ru) Учебный прибор дл исследовани электрического пол
JPS6119774U (ja) 走査電子顕微鏡を用いた電位測定装置
JPH024440Y2 (ja)
JPH0292657U (ja)
JPS594408U (ja) 透過電子顕微鏡
SU145303A1 (ru) Способ определени положени зрительной оси глаза
JPS58144753U (ja) 走査電子顕微鏡
JPS60105055U (ja) 電子顕微鏡
JPS6288907U (ja)
JPS5924218A (ja) 振動モ−ド測定装置
JPS6119781U (ja) 磁力分布検査装置
US2133140A (en) Recording device
JPS6151658U (ja)
JPS64259U (ja)
JPS59138162U (ja) 走査電子顕微鏡
JPS58193278U (ja) レ−ダ情報表示装置
JPS6031655U (ja) イオンマイクロアナライザ
JPS62158755U (ja)
JPS6187452U (ja)
JPS61162936U (ja)
JPS6241191U (ja)
JPS6284155U (ja)
JPH0412251U (ja)