JPS6414854A - Electron microscope for length measurement - Google Patents

Electron microscope for length measurement

Info

Publication number
JPS6414854A
JPS6414854A JP62170724A JP17072487A JPS6414854A JP S6414854 A JPS6414854 A JP S6414854A JP 62170724 A JP62170724 A JP 62170724A JP 17072487 A JP17072487 A JP 17072487A JP S6414854 A JPS6414854 A JP S6414854A
Authority
JP
Japan
Prior art keywords
visual field
pattern
coordinates
shift
voltage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62170724A
Other languages
Japanese (ja)
Other versions
JP2521964B2 (en
Inventor
Kazunari Hata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP62170724A priority Critical patent/JP2521964B2/en
Publication of JPS6414854A publication Critical patent/JPS6414854A/en
Application granted granted Critical
Publication of JP2521964B2 publication Critical patent/JP2521964B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Length-Measuring Devices Using Wave Or Particle Radiation (AREA)

Abstract

PURPOSE:To ensure the high-precision and quick length measurement of pattern dislocation by using an electrical visual field shift on dc voltage and detecting the coordinates of pattern edges within a large-magnification visual field on a control signal simultaneously. CONSTITUTION:A CPU 14 computes a voltage value to give the offset input of an adder 7d/so that the center of the visual field of an electron microscope will coincide with pattern, and gives the voltage value to the adder 7d. Then, the magnification of the microscope is made large and an image is read into a frame memory 10. Thereafter, the image is read out from the memory 10 and the coordinates of an edge position are detected and saved. The coordinates of other edge positions are obtained, using similar procedures. Then, a dislocation amount between the center positions of patterns 1 and 2 is obtained based on the results so obtained. In this case, the shift of a visual field between the images of each pattern edge is so constituted that a suitable dc current component is added to deflection voltage for deflecting an electron beam, and the value of the dc current component is made to correspond to the distance of the shift.
JP62170724A 1987-07-08 1987-07-08 Measuring method of electron microscope Expired - Fee Related JP2521964B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62170724A JP2521964B2 (en) 1987-07-08 1987-07-08 Measuring method of electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62170724A JP2521964B2 (en) 1987-07-08 1987-07-08 Measuring method of electron microscope

Publications (2)

Publication Number Publication Date
JPS6414854A true JPS6414854A (en) 1989-01-19
JP2521964B2 JP2521964B2 (en) 1996-08-07

Family

ID=15910215

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62170724A Expired - Fee Related JP2521964B2 (en) 1987-07-08 1987-07-08 Measuring method of electron microscope

Country Status (1)

Country Link
JP (1) JP2521964B2 (en)

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6180011A (en) * 1984-09-28 1986-04-23 Toshiba Corp Dimension measuring apparatus
JPS6288907U (en) * 1985-11-22 1987-06-06
JPS62117507U (en) * 1986-01-16 1987-07-25

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6180011A (en) * 1984-09-28 1986-04-23 Toshiba Corp Dimension measuring apparatus
JPS6288907U (en) * 1985-11-22 1987-06-06
JPS62117507U (en) * 1986-01-16 1987-07-25

Also Published As

Publication number Publication date
JP2521964B2 (en) 1996-08-07

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees