JPH0412251U - - Google Patents

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Publication number
JPH0412251U
JPH0412251U JP5345190U JP5345190U JPH0412251U JP H0412251 U JPH0412251 U JP H0412251U JP 5345190 U JP5345190 U JP 5345190U JP 5345190 U JP5345190 U JP 5345190U JP H0412251 U JPH0412251 U JP H0412251U
Authority
JP
Japan
Prior art keywords
scanning signal
frequency
direction scanning
triangular wave
amplitude
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5345190U
Other languages
English (en)
Other versions
JP2548948Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990053451U priority Critical patent/JP2548948Y2/ja
Publication of JPH0412251U publication Critical patent/JPH0412251U/ja
Application granted granted Critical
Publication of JP2548948Y2 publication Critical patent/JP2548948Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Physical Vapour Deposition (AREA)

Description

【図面の簡単な説明】
第１図ａは本考案の一実施例の構成を示す図、
第１図ｂは走査信号発生器のブロツク図、第２図
は一実施例の説明に使用する図で、第２図ａはＸ
方向走査信号生波形図、第２図ｃはＹ方向走査信
号第２図ｃはＹ方向走査信号の周波数変化を示す
図、第２図ｄはウエーハ上のイオンビーム走査パ
ターンを示す図である。第３図は従来例の説明に
使用する図で、第３図ａはＸ方向走査信号波形図
、第３図ｂはＹ方向走査信号波形図、第３図ｃは
ターゲツト・ホルダ上のイオンビーム走査パター
ンを示す図である。 １……走査信号発生器、１１……振幅関数発生
器、１２……ＶＣＯ（電圧制御発振器）、１３…
…波形整形回路、１４……ＡＭ変調回路、２……
走査信号増幅器、３−１，３−２……Ｘ偏向板、
４−１，４−２……Ｙ偏向板、５……ウハエー。

Claims (1)

    【実用新案登録請求の範囲】
  1. 振幅及び周波数一定の三角波からなるＸ（又は
    Ｙ）方向走査信号と、ターゲツト形状寸法の高さ
    に比例した振幅及び周波数（Ｘ（又はＹ）方向走
    査信号の周波数より大きい）の三角波からなるＹ
    （又はＸ）方向走査信号とそれぞれ発生する走査
    信号発生器を有することを特徴とする静電走査型
    イオン注入装置。
JP1990053451U 1990-05-22 1990-05-22 静電走査型イオン注入装置 Expired - Lifetime JP2548948Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990053451U JP2548948Y2 (ja) 1990-05-22 1990-05-22 静電走査型イオン注入装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990053451U JP2548948Y2 (ja) 1990-05-22 1990-05-22 静電走査型イオン注入装置

Publications (2)

Publication Number Publication Date
JPH0412251U true JPH0412251U (ja) 1992-01-31
JP2548948Y2 JP2548948Y2 (ja) 1997-09-24

Family

ID=31574646

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990053451U Expired - Lifetime JP2548948Y2 (ja) 1990-05-22 1990-05-22 静電走査型イオン注入装置

Country Status (1)

Country Link
JP (1) JP2548948Y2 (ja)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP5373702B2 (ja) 2010-06-07 2013-12-18 株式会社Ｓｅｎ イオンビームスキャン処理装置及びイオンビームスキャン処理方法

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5494275A (en) * 1978-01-10 1979-07-25 Toshiba Corp Implanting method of charge particles to semiconductor wafers and apparatus for the same

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5494275A (en) * 1978-01-10 1979-07-25 Toshiba Corp Implanting method of charge particles to semiconductor wafers and apparatus for the same

Also Published As

Publication number Publication date
JP2548948Y2 (ja) 1997-09-24

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Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

EXPY Cancellation because of completion of term