JPS62104444U - - Google Patents

Info

Publication number
JPS62104444U
JPS62104444U JP19668185U JP19668185U JPS62104444U JP S62104444 U JPS62104444 U JP S62104444U JP 19668185 U JP19668185 U JP 19668185U JP 19668185 U JP19668185 U JP 19668185U JP S62104444 U JPS62104444 U JP S62104444U
Authority
JP
Japan
Prior art keywords
insulating film
wiring layer
multilayer
multilayer wiring
wiring structure
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP19668185U
Other languages
English (en)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19668185U priority Critical patent/JPS62104444U/ja
Publication of JPS62104444U publication Critical patent/JPS62104444U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)

Description

【図面の簡単な説明】
第１図及び第２図は夫々本考案を説明するため
の断面図、平面図、第３図は従来例を説明するた
めの断面図である。 １１は半導体基体、１５は第１の絶縁膜、１６
は第１の配線層、１７は第２の絶縁膜、１８は第
２の配線層である。

Claims (1)

    【実用新案登録請求の範囲】
  1. 半導体基板の第１の絶縁膜上に設けた第１の配
    線層と該第１の配線層を被覆し前記第１の絶縁膜
    上に設けた第２の絶縁膜と該第２の絶縁膜上に設
    けた第２の配線層とを具備する多層配線構造にお
    いて、少なくとも前記第２の配線層の下部を残し
    て前記第２の絶縁膜を除去し、前記第１の配線層
    の一部を露出したことを特徴とする多層配線構造
    。
JP19668185U 1985-12-20 1985-12-20 Pending JPS62104444U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19668185U JPS62104444U (ja) 1985-12-20 1985-12-20

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19668185U JPS62104444U (ja) 1985-12-20 1985-12-20

Publications (1)

Publication Number Publication Date
JPS62104444U true JPS62104444U (ja) 1987-07-03

Family

ID=31155724

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19668185U Pending JPS62104444U (ja) 1985-12-20 1985-12-20

Country Status (1)

Country Link
JP (1) JPS62104444U (ja)

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