JPS6186970A - 有機薄膜の形成法 - Google Patents
有機薄膜の形成法Info
- Publication number
- JPS6186970A JPS6186970A JP20617884A JP20617884A JPS6186970A JP S6186970 A JPS6186970 A JP S6186970A JP 20617884 A JP20617884 A JP 20617884A JP 20617884 A JP20617884 A JP 20617884A JP S6186970 A JPS6186970 A JP S6186970A
- Authority
- JP
- Japan
- Prior art keywords
- film
- vacuum container
- deposited
- vapor
- evaporation
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000012528 membrane Substances 0.000 title abstract 2
- 230000015572 biosynthetic process Effects 0.000 title description 2
- 238000000034 method Methods 0.000 claims abstract description 18
- 238000001704 evaporation Methods 0.000 claims abstract description 12
- 230000008020 evaporation Effects 0.000 claims abstract description 11
- 239000003999 initiator Substances 0.000 claims abstract description 9
- 239000000203 mixture Substances 0.000 claims abstract description 9
- 229920005989 resin Polymers 0.000 claims abstract description 8
- 239000011347 resin Substances 0.000 claims abstract description 8
- 239000000758 substrate Substances 0.000 claims abstract description 8
- 239000000178 monomer Substances 0.000 claims abstract description 6
- 239000010408 film Substances 0.000 claims description 21
- 239000010409 thin film Substances 0.000 claims description 9
- 239000002985 plastic film Substances 0.000 abstract description 9
- 229920006255 plastic film Polymers 0.000 abstract description 8
- 229910052782 aluminium Inorganic materials 0.000 abstract description 7
- 229910052751 metal Inorganic materials 0.000 abstract description 7
- 239000002184 metal Substances 0.000 abstract description 7
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract description 6
- 238000001816 cooling Methods 0.000 abstract description 5
- 238000005566 electron beam evaporation Methods 0.000 abstract description 3
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 abstract description 3
- 229910052753 mercury Inorganic materials 0.000 abstract description 3
- 239000000463 material Substances 0.000 description 5
- 238000007796 conventional method Methods 0.000 description 4
- 229910052737 gold Inorganic materials 0.000 description 4
- 239000010931 gold Substances 0.000 description 4
- 239000003960 organic solvent Substances 0.000 description 4
- 150000001252 acrylic acid derivatives Chemical class 0.000 description 3
- 238000000576 coating method Methods 0.000 description 3
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 3
- 238000007740 vapor deposition Methods 0.000 description 3
- 239000000428 dust Substances 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 229920003023 plastic Polymers 0.000 description 2
- 229920006267 polyester film Polymers 0.000 description 2
- -1 polyol acrylates Chemical class 0.000 description 2
- 230000001681 protective effect Effects 0.000 description 2
- NIXOWILDQLNWCW-UHFFFAOYSA-M Acrylate Chemical compound [O-]C(=O)C=C NIXOWILDQLNWCW-UHFFFAOYSA-M 0.000 description 1
- 239000004593 Epoxy Substances 0.000 description 1
- CERQOIWHTDAKMF-UHFFFAOYSA-M Methacrylate Chemical compound CC(=C)C([O-])=O CERQOIWHTDAKMF-UHFFFAOYSA-M 0.000 description 1
- 239000004721 Polyphenylene oxide Substances 0.000 description 1
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 description 1
- 235000000126 Styrax benzoin Nutrition 0.000 description 1
- 244000028419 Styrax benzoin Species 0.000 description 1
- 235000008411 Sumatra benzointree Nutrition 0.000 description 1
- 150000005215 alkyl ethers Chemical class 0.000 description 1
- 239000012298 atmosphere Substances 0.000 description 1
- 239000013040 bath agent Substances 0.000 description 1
- 229960002130 benzoin Drugs 0.000 description 1
- RWCCWEUUXYIKHB-UHFFFAOYSA-N benzophenone Chemical compound C=1C=CC=CC=1C(=O)C1=CC=CC=C1 RWCCWEUUXYIKHB-UHFFFAOYSA-N 0.000 description 1
- 239000012965 benzophenone Substances 0.000 description 1
- 125000001797 benzyl group Chemical group [H]C1=C([H])C([H])=C(C([H])=C1[H])C([H])([H])* 0.000 description 1
- 239000003990 capacitor Substances 0.000 description 1
- 229910052804 chromium Inorganic materials 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- ISAOCJYIOMOJEB-UHFFFAOYSA-N desyl alcohol Natural products C=1C=CC=CC=1C(O)C(=O)C1=CC=CC=C1 ISAOCJYIOMOJEB-UHFFFAOYSA-N 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- UHESRSKEBRADOO-UHFFFAOYSA-N ethyl carbamate;prop-2-enoic acid Chemical class OC(=O)C=C.CCOC(N)=O UHESRSKEBRADOO-UHFFFAOYSA-N 0.000 description 1
- 235000019382 gum benzoic Nutrition 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 125000000962 organic group Chemical group 0.000 description 1
- 238000005192 partition Methods 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920000728 polyester Polymers 0.000 description 1
- 229920000570 polyether Polymers 0.000 description 1
- 229920005862 polyol Polymers 0.000 description 1
- QCTJRYGLPAFRMS-UHFFFAOYSA-N prop-2-enoic acid;1,3,5-triazine-2,4,6-triamine Chemical class OC(=O)C=C.NC1=NC(N)=NC(N)=N1 QCTJRYGLPAFRMS-UHFFFAOYSA-N 0.000 description 1
- 238000005096 rolling process Methods 0.000 description 1
- 229910052709 silver Inorganic materials 0.000 description 1
- 239000004332 silver Substances 0.000 description 1
- 238000009751 slip forming Methods 0.000 description 1
- 241000894007 species Species 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 231100000331 toxic Toxicity 0.000 description 1
- 230000002588 toxic effect Effects 0.000 description 1
- 229920006305 unsaturated polyester Polymers 0.000 description 1
- 238000007738 vacuum evaporation Methods 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Landscapes
- Application Of Or Painting With Fluid Materials (AREA)
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20617884A JPS6186970A (ja) | 1984-10-03 | 1984-10-03 | 有機薄膜の形成法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP20617884A JPS6186970A (ja) | 1984-10-03 | 1984-10-03 | 有機薄膜の形成法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6186970A true JPS6186970A (ja) | 1986-05-02 |
| JPH0317902B2 JPH0317902B2 (enrdf_load_stackoverflow) | 1991-03-11 |
Family
ID=16519102
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP20617884A Granted JPS6186970A (ja) | 1984-10-03 | 1984-10-03 | 有機薄膜の形成法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6186970A (enrdf_load_stackoverflow) |
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001345559A (ja) * | 2000-02-09 | 2001-12-14 | Ngk Spark Plug Co Ltd | 配線基板及びその製造方法 |
| JP2009270145A (ja) * | 2008-05-02 | 2009-11-19 | Fujifilm Corp | 成膜装置 |
| JP2020139102A (ja) * | 2019-03-01 | 2020-09-03 | 株式会社ニデック | ハードコート付き樹脂体の製造方法 |
| WO2022047947A1 (zh) * | 2020-09-05 | 2022-03-10 | 昆山鑫美源电子科技有限公司 | 一种多辊式真空镀膜装置 |
-
1984
- 1984-10-03 JP JP20617884A patent/JPS6186970A/ja active Granted
Cited By (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001345559A (ja) * | 2000-02-09 | 2001-12-14 | Ngk Spark Plug Co Ltd | 配線基板及びその製造方法 |
| JP2009270145A (ja) * | 2008-05-02 | 2009-11-19 | Fujifilm Corp | 成膜装置 |
| JP2020139102A (ja) * | 2019-03-01 | 2020-09-03 | 株式会社ニデック | ハードコート付き樹脂体の製造方法 |
| WO2022047947A1 (zh) * | 2020-09-05 | 2022-03-10 | 昆山鑫美源电子科技有限公司 | 一种多辊式真空镀膜装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0317902B2 (enrdf_load_stackoverflow) | 1991-03-11 |
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