JPS6186970A - Formation of organic membrane - Google Patents

Abstract

PURPOSE:To safely and efficiently form a membrane with good quality, by respectively evaporating film forming compositions to precipitate the same on a substrate as a mixture with a desired compositional ratio and subsequently applying ultraviolet curing treatment to the formed film. CONSTITUTION:A plastic film 3, to which, for example, an aluminum film was vapor-deposited in a vacuum container 1 by the operation of an electron beam evaporation source 12, runs along the periphery of the cooling can 7 in a vacuum container 2 through a guide roller 8, a passing opening 10 and a guide roller 9. Two independent evaporation sources 13, 14 respectively evaporate an oligomer or monomer of an ultraviolet curable resin and a photopolymerization initiator in a desired compositional ratio. A composition is vapor-deposited on the plastic film 3 in a desired thickness by evaporation and subsequently irradiated with ultraviolet rays from a high pressure mercury lamp 15 to continuously produce an org. film. with good quality for protecting a metal film in a consistent process.

Description

DETAILED DESCRIPTION OF THE INVENTION Field of the Invention The present invention relates to a method for forming an organic thin film on the surface of a substrate such as a plastic film or sheet.

BACKGROUND OF THE INVENTION Recently, coatings of ultraviolet curable resins have been increasingly used for surface hardening of materials such as plastic films that cannot be treated at high temperatures.

By the way, the conventional coating method involves dissolving the main component oligomer and photopolymerization initiator in a bath agent or liquid monomer, applying this to the surface of the substrate, drying it, and then applying ultraviolet irradiation treatment. and hardening.

Also, for decorative plastic products such as gold paper and silver paper,
A thin metal film containing % Al or Cr is formed on a transparent plastic substrate by vacuum evaporation or sputtering, and then an organic protective film is formed by the method described above. In addition, for some applications, in order to improve the adhesion between the base material and the metal thin film or to adjust the color, an organic film may be formed on the surface of the base material in advance and then a metal film may be formed.
Furthermore, an organic film may be formed again on the surface.

In such a case, in the conventional method as described above, it is necessary to perform the coating step in the atmosphere and the metal rolling forming step in vacuum two or more times, resulting in poor mass productivity. Furthermore, since conventional methods use organic solvents, they are flammable and toxic, and pose a high risk of fire and pollution. Furthermore, the conventional method has the disadvantage that it is difficult to form a thin film uniformly.

Problems to be Solved by the Invention Therefore, the present invention solves the problems of flammability and 1d property associated with the use of fi + organic solvents in conventional methods, (2) uniform thin S
The disadvantages of f formation and the disadvantages of +a+ mass production)]
The purpose of the present invention is to provide a new method for forming an organic film that can be erased by F.

Means for Solving the Problems In order to achieve the above object, the method for forming an organic thin film according to the present invention involves separately applying an oligomer or monomer of an ultraviolet curable resin and a photopolymerization initiator to the surface of a substrate in vacuum. It is characterized in that it is evaporated from an evaporation source to precipitate a mixture having a desired composition on the surface of the substrate, and then cured by ultraviolet irradiation treatment.

Oligomers of UV-curable resins that can be used in the method according to the invention include epoxy acrylates, urethane acrylates, polyester acrylates, polyether acrylates, polyol acrylates, and melamine acrylates.

Unsaturated polyester etc. can be used, and various acrylate and methacrylate monomers can also be used. However, oligomers can be preferably used from the viewpoint of ease of vapor deposition and curing speed.

In addition, as a photopolymerization initiator, benzyl, benzophenone,
(Commonly used ones such as linzoin and alkyl ethers can be used.

Effect By having the above-described structure, the method of the present invention can form an organic thin film without using an organic solvent, and since it is a vacuum process, it can be performed using the same equipment as in the process of forming a metal layer. It can be carried out and manufactured in an integrated manner, it can prevent the contamination of dust, etc., and it can form a thin film with water.

In addition, in the method of the present invention, a large number of evaporation sources are used to
It is also possible to evaporate more than one species of oligomer or monomer to obtain a mixture thereof or a deposited product with a multilayer structure.

Furthermore, in the method according to the present invention, a fine pattern can be formed by using a mask during ultraviolet irradiation,
It can also be applied to forming insulating films for ICs and manufacturing capacitors.

EXAMPLE An example of an apparatus implementing the method of the present invention will be described below with reference to the accompanying drawings.

The illustrated apparatus 1 has two vacuum vessels 1, 2, vacuum vessel 1 is used to deposit gold 4, while vacuum vessel 2 is used to form an organic thin film according to the present invention, and The structure is such that both steps can be carried out consecutively.

That is, in the drawing, a plastic film 6 to be processed is conveyed between an unwinding roller 4 provided in a vacuum container 1 and a take-up roller 5 provided in a vacuum container 2, and 6 and 7 are cooling cans, respectively. 8 and 9 are guide rollers, and 10 is an HFC plastic film 30 passage opening provided in the partition wall 11 between the empty rain gear containers 1 and 2. Also, inside each vacuum vessel 1, 2, as shown in the figure, an electron beam evaporation source 1 is placed opposite each combined cooling can 6.7.
2, a resin oligomer evaporation source 13, and a photopolymerization initiator evaporation source 14 are provided. Further, as shown in the figure, a plurality of ultraviolet generators (for example, high-pressure mercury lamps) 15 are arranged adjacent to the cooling can 7 in the vacuum container 2 . Each vacuum container 1, 2 has an exhaust port 1a, 2, respectively.
It is connected to an exhaust system (not shown) via a.

In the operation of the apparatus configured as described above, the deposition of the gold PA film within the vacuum vessel 1 is not directly related to the present invention, but the operation of the electron beam evaporation source 12 causes the plastic film 3 on which an aluminum film is deposited, for example, to be deposited. runs along the circumference of the cooling can 7 through a guide roller 8, a rough road opening 10 and a guide roller 9. Two independent evaporation stations 13 and 14 evaporate the oligomer and photopolymerization initiator to a desired composition ratio. This platform evaporation rate varies depending on the oligomer and photopolymerization initiator used, so the temperature of the evaporation source 13 and 14 is controlled and adjusted while taking these factors into consideration. After vapor deposition, the high-pressure mercury lamp 15 is turned on to irradiate ultraviolet rays to perform a curing process.

In the illustrated apparatus, a resin film is first formed on a plastic film 3 in a vacuum container 2, a metal film such as aluminum is formed in a vacuum container 1, and an organic film is again formed thereon. It is also possible to form a multilayer film. It is also possible to modify the illustrated apparatus to configure it in an in-line manner so that each film-forming layer can be sequentially processed in each of the sequentially arranged processing chambers.

Next, an experimental example will be described in which aluminum was vapor-deposited on a polyester film using the illustrated apparatus and an organic film was formed on the surface.

Base material: 12 μm thick polyester film AW oligomer 2-epoxy acrylate (Showa Kobunshi @ VR-90) 100 parts photopolymerization initiator
:Benzoin alkyl ether 3 parts resin vapor deposition 1 return thickness
: 0.5 μm Vacuum Required:
An organic film was formed on the surface of a translucent film on which aluminum was vapor-deposited to a thickness of The hardness of the previous aluminum film was 3B.

From this, it is recognized that the organic group formed by the method according to the present invention can function satisfactorily as a protective film.

Effects As explained above, since the method of the present invention is a vacuum process, the organic film can be continuously formed using the same equipment as the process for forming the gold bridge layer, which greatly improves productivity. Furthermore, an extremely thin film can be uniformly formed. Furthermore, since no organic solvent is used and the treatment is carried out in a vacuum container, there is no risk of ignition or pollution, and moreover, it is possible to prevent foreign matter such as dust from entering.

[Brief explanation of the drawing]

The drawing is a schematic cross-sectional view showing an example of an apparatus implementing the present invention. In the figure, 22 vacuum container, 3: base material, 13, 14: evaporation + 1% + 15' ultraviolet ray generator.

Claims (1)

[Claims] The oligomer or monomer of the ultraviolet curable resin and the photopolymerization initiator are evaporated from separate evaporation sources onto the surface of the substrate in vacuum, and a mixture with the desired composition is precipitated on the surface of the substrate, followed by ultraviolet irradiation treatment. 1. A method for forming an organic thin film, comprising curing the film by curing the film.