JPS6152983B2 - - Google Patents

Info

Publication number
JPS6152983B2
JPS6152983B2 JP56046770A JP4677081A JPS6152983B2 JP S6152983 B2 JPS6152983 B2 JP S6152983B2 JP 56046770 A JP56046770 A JP 56046770A JP 4677081 A JP4677081 A JP 4677081A JP S6152983 B2 JPS6152983 B2 JP S6152983B2
Authority
JP
Japan
Prior art keywords
substrate
polycrystalline silicon
oxide film
shaped groove
crystal silicon
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP56046770A
Other languages
English (en)
Japanese (ja)
Other versions
JPS57162345A (en
Inventor
Akinobu Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JIDO KEISOKU GIJUTSU KENKYUKUMIAI
Original Assignee
JIDO KEISOKU GIJUTSU KENKYUKUMIAI
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by JIDO KEISOKU GIJUTSU KENKYUKUMIAI filed Critical JIDO KEISOKU GIJUTSU KENKYUKUMIAI
Priority to JP56046770A priority Critical patent/JPS57162345A/ja
Publication of JPS57162345A publication Critical patent/JPS57162345A/ja
Publication of JPS6152983B2 publication Critical patent/JPS6152983B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H10W10/011—
    • H10W10/10—

Landscapes

  • Local Oxidation Of Silicon (AREA)
  • Element Separation (AREA)
  • Mechanical Treatment Of Semiconductor (AREA)
JP56046770A 1981-03-30 1981-03-30 Manufacture of insulation isolating substrate Granted JPS57162345A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP56046770A JPS57162345A (en) 1981-03-30 1981-03-30 Manufacture of insulation isolating substrate

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP56046770A JPS57162345A (en) 1981-03-30 1981-03-30 Manufacture of insulation isolating substrate

Publications (2)

Publication Number Publication Date
JPS57162345A JPS57162345A (en) 1982-10-06
JPS6152983B2 true JPS6152983B2 (enExample) 1986-11-15

Family

ID=12756557

Family Applications (1)

Application Number Title Priority Date Filing Date
JP56046770A Granted JPS57162345A (en) 1981-03-30 1981-03-30 Manufacture of insulation isolating substrate

Country Status (1)

Country Link
JP (1) JPS57162345A (enExample)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63140041U (enExample) * 1987-03-07 1988-09-14

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0722629A (ja) * 1991-06-25 1995-01-24 Mitsubishi Materials Shilicon Corp 半導体装置の製造方法

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS63140041U (enExample) * 1987-03-07 1988-09-14

Also Published As

Publication number Publication date
JPS57162345A (en) 1982-10-06

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