JPS6141233Y2 - - Google Patents
Info
- Publication number
- JPS6141233Y2 JPS6141233Y2 JP14785481U JP14785481U JPS6141233Y2 JP S6141233 Y2 JPS6141233 Y2 JP S6141233Y2 JP 14785481 U JP14785481 U JP 14785481U JP 14785481 U JP14785481 U JP 14785481U JP S6141233 Y2 JPS6141233 Y2 JP S6141233Y2
- Authority
- JP
- Japan
- Prior art keywords
- wafer
- suction
- suction table
- measurement
- suction device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000032258 transport Effects 0.000 claims 2
- 235000012431 wafers Nutrition 0.000 description 41
- 238000005259 measurement Methods 0.000 description 13
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 7
- 239000004065 semiconductor Substances 0.000 description 5
- 230000002950 deficient Effects 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 1
- 238000004070 electrodeposition Methods 0.000 description 1
- 238000000034 method Methods 0.000 description 1
Landscapes
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14785481U JPS5853149U (ja) | 1981-10-05 | 1981-10-05 | ウエハ搬送装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14785481U JPS5853149U (ja) | 1981-10-05 | 1981-10-05 | ウエハ搬送装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5853149U JPS5853149U (ja) | 1983-04-11 |
| JPS6141233Y2 true JPS6141233Y2 (enrdf_load_stackoverflow) | 1986-11-25 |
Family
ID=29940695
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14785481U Granted JPS5853149U (ja) | 1981-10-05 | 1981-10-05 | ウエハ搬送装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5853149U (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS63132444A (ja) * | 1986-11-21 | 1988-06-04 | Nissin Electric Co Ltd | ウエハハンドリング装置 |
| JP6276053B2 (ja) * | 2014-02-13 | 2018-02-07 | 東京エレクトロン株式会社 | プローバ |
-
1981
- 1981-10-05 JP JP14785481U patent/JPS5853149U/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5853149U (ja) | 1983-04-11 |
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