JPS61284577A - 薄膜形成装置 - Google Patents

薄膜形成装置

Info

Publication number
JPS61284577A
JPS61284577A JP12422385A JP12422385A JPS61284577A JP S61284577 A JPS61284577 A JP S61284577A JP 12422385 A JP12422385 A JP 12422385A JP 12422385 A JP12422385 A JP 12422385A JP S61284577 A JPS61284577 A JP S61284577A
Authority
JP
Japan
Prior art keywords
substrate
thin film
liquid
roller
film forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP12422385A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0510985B2 (enrdf_load_stackoverflow
Inventor
Yuji Nomura
野村　裕司
Isao Yamanaka
勲 山中
Toshiyoshi Suzuki
鈴木　利儀
Kazuhiro Imai
今井　和弘
Shintaro Suzuki
信太郎 鈴木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Futaba Corp
Imai Seisakusho Co Ltd
Original Assignee
Futaba Corp
Imai Seisakusho Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Futaba Corp, Imai Seisakusho Co Ltd filed Critical Futaba Corp
Priority to JP12422385A priority Critical patent/JPS61284577A/ja
Publication of JPS61284577A publication Critical patent/JPS61284577A/ja
Publication of JPH0510985B2 publication Critical patent/JPH0510985B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
    • H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
    • H01S3/02—Constructional details
    • H01S3/03—Constructional details of gas laser discharge tubes
    • H01S3/038—Electrodes, e.g. special shape, configuration or composition

Landscapes

  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Liquid Crystal (AREA)
  • Engineering & Computer Science (AREA)
  • Plasma & Fusion (AREA)
  • Optics & Photonics (AREA)
  • Coating Apparatus (AREA)
  • Manufacturing Of Electric Cables (AREA)
JP12422385A 1985-06-10 1985-06-10 薄膜形成装置 Granted JPS61284577A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP12422385A JPS61284577A (ja) 1985-06-10 1985-06-10 薄膜形成装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP12422385A JPS61284577A (ja) 1985-06-10 1985-06-10 薄膜形成装置

Publications (2)

Publication Number Publication Date
JPS61284577A true JPS61284577A (ja) 1986-12-15
JPH0510985B2 JPH0510985B2 (enrdf_load_stackoverflow) 1993-02-12

Family

ID=14880035

Family Applications (1)

Application Number Title Priority Date Filing Date
JP12422385A Granted JPS61284577A (ja) 1985-06-10 1985-06-10 薄膜形成装置

Country Status (1)

Country Link
JP (1) JPS61284577A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0655114A (ja) * 1992-06-09 1994-03-01 Kanken Techno Kk 洗浄装置および洗浄方法

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS534848A (en) * 1976-07-02 1978-01-17 Hitachi Ltd Magnetic amplifier
JPS5740118U (enrdf_load_stackoverflow) * 1980-08-15 1982-03-04
JPS5858175A (ja) * 1981-10-02 1983-04-06 Tamai Tekko:Kk 塗装システム
JPS5954563U (ja) * 1982-09-30 1984-04-10 株式会社東芝 現像およびエツチング装置

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS534848A (en) * 1976-07-02 1978-01-17 Hitachi Ltd Magnetic amplifier
JPS5740118U (enrdf_load_stackoverflow) * 1980-08-15 1982-03-04
JPS5858175A (ja) * 1981-10-02 1983-04-06 Tamai Tekko:Kk 塗装システム
JPS5954563U (ja) * 1982-09-30 1984-04-10 株式会社東芝 現像およびエツチング装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0655114A (ja) * 1992-06-09 1994-03-01 Kanken Techno Kk 洗浄装置および洗浄方法

Also Published As

Publication number Publication date
JPH0510985B2 (enrdf_load_stackoverflow) 1993-02-12

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees