JPS61232646A - 樹脂封止型半導体集積回路装置 - Google Patents
樹脂封止型半導体集積回路装置Info
- Publication number
- JPS61232646A JPS61232646A JP7481885A JP7481885A JPS61232646A JP S61232646 A JPS61232646 A JP S61232646A JP 7481885 A JP7481885 A JP 7481885A JP 7481885 A JP7481885 A JP 7481885A JP S61232646 A JPS61232646 A JP S61232646A
- Authority
- JP
- Japan
- Prior art keywords
- layer
- protective layer
- region
- resin
- wiring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 title claims description 17
- 239000010410 layer Substances 0.000 claims abstract description 49
- 239000011241 protective layer Substances 0.000 claims abstract description 38
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims abstract description 19
- 229920005989 resin Polymers 0.000 claims abstract description 13
- 239000011347 resin Substances 0.000 claims abstract description 13
- 239000013013 elastic material Substances 0.000 claims abstract description 4
- 239000004593 Epoxy Substances 0.000 claims description 5
- 229920002050 silicone resin Polymers 0.000 claims description 4
- 229920001721 polyimide Polymers 0.000 claims description 2
- 239000009719 polyimide resin Substances 0.000 claims description 2
- 239000000377 silicon dioxide Substances 0.000 claims description 2
- 229910052814 silicon oxide Inorganic materials 0.000 abstract description 15
- 230000035882 stress Effects 0.000 abstract description 15
- 239000011229 interlayer Substances 0.000 abstract description 10
- 239000000758 substrate Substances 0.000 abstract description 9
- 230000008646 thermal stress Effects 0.000 abstract description 9
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 abstract description 8
- 229910052710 silicon Inorganic materials 0.000 abstract description 8
- 239000010703 silicon Substances 0.000 abstract description 8
- 239000012535 impurity Substances 0.000 abstract description 7
- 239000000463 material Substances 0.000 abstract description 5
- 229910021420 polycrystalline silicon Inorganic materials 0.000 abstract description 5
- 238000007789 sealing Methods 0.000 abstract description 5
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 abstract description 4
- 229910052782 aluminium Inorganic materials 0.000 abstract description 4
- 230000000694 effects Effects 0.000 abstract description 3
- 238000002955 isolation Methods 0.000 abstract description 3
- 238000007493 shaping process Methods 0.000 abstract 1
- 238000000605 extraction Methods 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
- 230000006378 damage Effects 0.000 description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 239000003822 epoxy resin Substances 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 229920000647 polyepoxide Polymers 0.000 description 2
- 239000003513 alkali Substances 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 230000005669 field effect Effects 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 150000002500 ions Chemical class 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 230000007257 malfunction Effects 0.000 description 1
- 239000004033 plastic Substances 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 239000000088 plastic resin Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 210000001747 pupil Anatomy 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- 150000003377 silicon compounds Chemical class 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L23/00—Details of semiconductor or other solid state devices
- H01L23/28—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection
- H01L23/31—Encapsulations, e.g. encapsulating layers, coatings, e.g. for protection characterised by the arrangement or shape
- H01L23/3157—Partial encapsulation or coating
- H01L23/3192—Multilayer coating
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/0002—Not covered by any one of groups H01L24/00, H01L24/00 and H01L2224/00
Landscapes
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Engineering & Computer Science (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Structures Or Materials For Encapsulating Or Coating Semiconductor Devices Or Solid State Devices (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7481885A JPS61232646A (ja) | 1985-04-09 | 1985-04-09 | 樹脂封止型半導体集積回路装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP7481885A JPS61232646A (ja) | 1985-04-09 | 1985-04-09 | 樹脂封止型半導体集積回路装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61232646A true JPS61232646A (ja) | 1986-10-16 |
JPH0415626B2 JPH0415626B2 (enrdf_load_stackoverflow) | 1992-03-18 |
Family
ID=13558272
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP7481885A Granted JPS61232646A (ja) | 1985-04-09 | 1985-04-09 | 樹脂封止型半導体集積回路装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61232646A (enrdf_load_stackoverflow) |
Cited By (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
FR2625839A1 (fr) * | 1988-01-13 | 1989-07-13 | Sgs Thomson Microelectronics | Procede de passivation d'un circuit integre |
US5627403A (en) * | 1993-05-31 | 1997-05-06 | Sgs-Thomson Microelectronics S.R.L. | Adhesion between dielectric layers in an integrated circuit |
US5633534A (en) * | 1993-12-06 | 1997-05-27 | Sgs-Thomson Microelectronics, Inc. | Integrated circuit with enhanced planarization |
US5793114A (en) * | 1993-12-17 | 1998-08-11 | Sgs-Thomson Microelectronics, Inc. | Self-aligned method for forming contact with zero offset to gate |
US6051864A (en) * | 1993-12-17 | 2000-04-18 | Stmicroelectronics, Inc. | Memory masking for periphery salicidation of active regions |
US6107194A (en) * | 1993-12-17 | 2000-08-22 | Stmicroelectronics, Inc. | Method of fabricating an integrated circuit |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5723229A (en) * | 1980-07-17 | 1982-02-06 | Toshiba Corp | Semiconductor device and its manufacture |
JPS57104532U (enrdf_load_stackoverflow) * | 1980-12-16 | 1982-06-28 |
-
1985
- 1985-04-09 JP JP7481885A patent/JPS61232646A/ja active Granted
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5723229A (en) * | 1980-07-17 | 1982-02-06 | Toshiba Corp | Semiconductor device and its manufacture |
JPS57104532U (enrdf_load_stackoverflow) * | 1980-12-16 | 1982-06-28 |
Cited By (14)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH01225326A (ja) * | 1988-01-13 | 1989-09-08 | Sgs Thomson Microelectron Sa | 集積回路のパッシベーション方法 |
FR2625839A1 (fr) * | 1988-01-13 | 1989-07-13 | Sgs Thomson Microelectronics | Procede de passivation d'un circuit integre |
US5795821A (en) * | 1993-05-31 | 1998-08-18 | Sgs-Thomson Microelectronics, S.R.L. | Process for improving the interface union among dielectric materials in an integrated circuit manufacture |
US5627403A (en) * | 1993-05-31 | 1997-05-06 | Sgs-Thomson Microelectronics S.R.L. | Adhesion between dielectric layers in an integrated circuit |
US5837613A (en) * | 1993-12-06 | 1998-11-17 | Stmicroelectronics, Inc. | Enhanced planarization technique for an integrated circuit |
US5633534A (en) * | 1993-12-06 | 1997-05-27 | Sgs-Thomson Microelectronics, Inc. | Integrated circuit with enhanced planarization |
US5986330A (en) * | 1993-12-06 | 1999-11-16 | Stmicroelectronics, Inc. | Enhanced planarization technique for an integrated circuit |
USRE39690E1 (en) * | 1993-12-06 | 2007-06-12 | Stmicroelectronics, Inc. | Enhanced planarization technique for an integrated circuit |
US5793114A (en) * | 1993-12-17 | 1998-08-11 | Sgs-Thomson Microelectronics, Inc. | Self-aligned method for forming contact with zero offset to gate |
US6051864A (en) * | 1993-12-17 | 2000-04-18 | Stmicroelectronics, Inc. | Memory masking for periphery salicidation of active regions |
US6107194A (en) * | 1993-12-17 | 2000-08-22 | Stmicroelectronics, Inc. | Method of fabricating an integrated circuit |
US6284584B1 (en) * | 1993-12-17 | 2001-09-04 | Stmicroelectronics, Inc. | Method of masking for periphery salicidation of active regions |
US6514811B2 (en) | 1993-12-17 | 2003-02-04 | Stmicroelectronics, Inc. | Method for memory masking for periphery salicidation of active regions |
US6661064B2 (en) | 1993-12-17 | 2003-12-09 | Stmicroelectronics, Inc. | Memory masking for periphery salicidation of active regions |
Also Published As
Publication number | Publication date |
---|---|
JPH0415626B2 (enrdf_load_stackoverflow) | 1992-03-18 |
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