JPS61214937A - 吸着保持装置 - Google Patents

吸着保持装置

Info

Publication number
JPS61214937A
JPS61214937A JP5060585A JP5060585A JPS61214937A JP S61214937 A JPS61214937 A JP S61214937A JP 5060585 A JP5060585 A JP 5060585A JP 5060585 A JP5060585 A JP 5060585A JP S61214937 A JPS61214937 A JP S61214937A
Authority
JP
Japan
Prior art keywords
suction
valve
holding device
pin
suction port
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5060585A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0232092B2 (enrdf_load_stackoverflow
Inventor
Yoshinori Shimamura
島村　吉則
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP5060585A priority Critical patent/JPS61214937A/ja
Publication of JPS61214937A publication Critical patent/JPS61214937A/ja
Publication of JPH0232092B2 publication Critical patent/JPH0232092B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
    • B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING OR HOLDING
    • B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
    • B25B11/005—Vacuum work holders

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Jigs For Machine Tools (AREA)
JP5060585A 1985-03-15 1985-03-15 吸着保持装置 Granted JPS61214937A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5060585A JPS61214937A (ja) 1985-03-15 1985-03-15 吸着保持装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5060585A JPS61214937A (ja) 1985-03-15 1985-03-15 吸着保持装置

Publications (2)

Publication Number Publication Date
JPS61214937A true JPS61214937A (ja) 1986-09-24
JPH0232092B2 JPH0232092B2 (enrdf_load_stackoverflow) 1990-07-18

Family

ID=12863596

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5060585A Granted JPS61214937A (ja) 1985-03-15 1985-03-15 吸着保持装置

Country Status (1)

Country Link
JP (1) JPS61214937A (enrdf_load_stackoverflow)

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01206643A (ja) * 1988-02-13 1989-08-18 Shinkawa Ltd 基板吸着構造
US20150357217A1 (en) * 2012-12-28 2015-12-10 Shanghai Micro Electronics Equipment Co,, Ltd Warped silicon-chip adsorption device and adsorption method thereof
WO2016054397A1 (en) * 2014-10-03 2016-04-07 Applied Materials, Inc. Spring-loaded pins for susceptor assembly and processing methods using same
CN106252791A (zh) * 2015-06-12 2016-12-21 睿励科学仪器（上海）有限公司 硅片吸盘
USD980884S1 (en) 2021-03-02 2023-03-14 Applied Materials, Inc. Lift pin
US12183618B2 (en) 2020-10-01 2024-12-31 Applied Materials, Inc. Apparatus and methods to transfer substrates into and out of a spatial multi-substrate processing tool

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS432692Y1 (enrdf_load_stackoverflow) * 1964-12-23 1968-02-03
JPS50125895U (enrdf_load_stackoverflow) * 1974-03-29 1975-10-15
JPS5646529A (en) * 1979-09-21 1981-04-27 Citizen Watch Co Ltd Wafer chuck

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS432692Y1 (enrdf_load_stackoverflow) * 1964-12-23 1968-02-03
JPS50125895U (enrdf_load_stackoverflow) * 1974-03-29 1975-10-15
JPS5646529A (en) * 1979-09-21 1981-04-27 Citizen Watch Co Ltd Wafer chuck

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01206643A (ja) * 1988-02-13 1989-08-18 Shinkawa Ltd 基板吸着構造
US20150357217A1 (en) * 2012-12-28 2015-12-10 Shanghai Micro Electronics Equipment Co,, Ltd Warped silicon-chip adsorption device and adsorption method thereof
WO2016054397A1 (en) * 2014-10-03 2016-04-07 Applied Materials, Inc. Spring-loaded pins for susceptor assembly and processing methods using same
US10192770B2 (en) 2014-10-03 2019-01-29 Applied Materials, Inc. Spring-loaded pins for susceptor assembly and processing methods using same
CN106252791A (zh) * 2015-06-12 2016-12-21 睿励科学仪器（上海）有限公司 硅片吸盘
CN106252791B (zh) * 2015-06-12 2019-02-19 睿励科学仪器（上海）有限公司 硅片吸盘
US12183618B2 (en) 2020-10-01 2024-12-31 Applied Materials, Inc. Apparatus and methods to transfer substrates into and out of a spatial multi-substrate processing tool
USD980884S1 (en) 2021-03-02 2023-03-14 Applied Materials, Inc. Lift pin

Also Published As

Publication number Publication date
JPH0232092B2 (enrdf_load_stackoverflow) 1990-07-18

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