USD980884S1 - Lift pin - Google Patents
Lift pin Download PDFInfo
- Publication number
- USD980884S1 USD980884S1 US29/772,523 US202129772523F USD980884S US D980884 S1 USD980884 S1 US D980884S1 US 202129772523 F US202129772523 F US 202129772523F US D980884 S USD980884 S US D980884S
- Authority
- US
- United States
- Prior art keywords
- lift pin
- view
- lift
- pin
- ornamental design
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Active
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Description
This application claims priority to U.S. patent application Ser. No. 17/061,015, filed Oct. 1, 2020, the entire disclosure of which is hereby incorporated by reference herein.
Claims (1)
- The ornamental design for a lift pin, substantially as shown and described.
Priority Applications (2)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US29/772,523 USD980884S1 (en) | 2021-03-02 | 2021-03-02 | Lift pin |
TW110304619F TWD221365S (en) | 2021-03-02 | 2021-09-02 | Lift pin for a semiconductor manufacturing processing chamber |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
US29/772,523 USD980884S1 (en) | 2021-03-02 | 2021-03-02 | Lift pin |
Publications (1)
Publication Number | Publication Date |
---|---|
USD980884S1 true USD980884S1 (en) | 2023-03-14 |
Family
ID=85462871
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
US29/772,523 Active USD980884S1 (en) | 2021-03-02 | 2021-03-02 | Lift pin |
Country Status (2)
Country | Link |
---|---|
US (1) | USD980884S1 (en) |
TW (1) | TWD221365S (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD1009817S1 (en) * | 2021-09-28 | 2024-01-02 | Applied Materials, Inc. | Shadow ring lift pin |
USD1019463S1 (en) * | 2019-05-28 | 2024-03-26 | Louis Vuitton Malletier | Pin and the like |
Citations (34)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3015709A (en) * | 1959-04-09 | 1962-01-02 | Ite Circuit Breaker Ltd | Cover lift pin |
JPS61214937A (en) | 1985-03-15 | 1986-09-24 | Canon Inc | Attractive holder |
US4790258A (en) | 1987-04-03 | 1988-12-13 | Tegal Corporation | Magnetically coupled wafer lift pins |
US5823153A (en) | 1997-05-08 | 1998-10-20 | Briggs & Stratton Corporation | Compressing release with snap-in components |
US6032691A (en) | 1999-03-29 | 2000-03-07 | Kaylynn, Inc. | Valve assembly |
US6148762A (en) | 1998-02-17 | 2000-11-21 | Frontec Incorporated | Plasma processing apparatus |
EP1174910A2 (en) | 2000-07-20 | 2002-01-23 | Applied Materials, Inc. | Method and apparatus for dechucking a substrate |
US6389677B1 (en) | 1999-03-30 | 2002-05-21 | Lam Research Corporation | Perimeter wafer lifting |
US6550484B1 (en) | 2001-12-07 | 2003-04-22 | Novellus Systems, Inc. | Apparatus for maintaining wafer back side and edge exclusion during supercritical fluid processing |
US20040045509A1 (en) * | 2002-09-10 | 2004-03-11 | Or David T. | Reduced friction lift pin |
US20050000453A1 (en) | 2003-06-02 | 2005-01-06 | Chul-Ju Hwang | Apparatus for semiconductor device and method using the same |
USD504313S1 (en) * | 2002-02-20 | 2005-04-26 | Airbus Deutschland Gmbh | Lockbolt |
US6884319B2 (en) * | 2001-11-12 | 2005-04-26 | Jusung Engineering Co., Ltd. | Susceptor of apparatus for manufacturing semiconductor device |
US7180283B2 (en) | 2002-07-17 | 2007-02-20 | Infineon Technologies, Ag | Wafer lifting device |
US7187188B2 (en) | 2003-12-24 | 2007-03-06 | Cascade Microtech, Inc. | Chuck with integrated wafer support |
US20070089672A1 (en) | 2005-09-30 | 2007-04-26 | Akinori Shimamura | Substrate placing mechanism |
US7292428B2 (en) | 2005-04-26 | 2007-11-06 | Applied Materials, Inc. | Electrostatic chuck with smart lift-pin mechanism for a plasma reactor |
USD568914S1 (en) * | 2002-09-10 | 2008-05-13 | Applied Materials, Inc. | Substrate support lift pin |
US20080134814A1 (en) * | 2006-12-11 | 2008-06-12 | Jong Sun Kim | Lift pin driving device and manufacturing apparatus having same |
CN100440476C (en) | 2005-09-30 | 2008-12-03 | 东京毅力科创株式会社 | Substrate placing mechanism and substrate processing device |
CN101352108A (en) | 2005-12-28 | 2009-01-21 | 夏普株式会社 | Stage apparatus and plasma processing apparatus |
KR20090132335A (en) | 2008-06-20 | 2009-12-30 | 세크론 주식회사 | Molding apparatus for semiconductor device |
WO2010109373A2 (en) | 2009-03-24 | 2010-09-30 | Lam Research Corporation | Method and apparatus for reduction of voltage potential spike during dechucking |
USD635597S1 (en) * | 2008-11-17 | 2011-04-05 | Applied Materials, Inc. | Lift pin |
USD640715S1 (en) * | 2008-11-17 | 2011-06-28 | Applied Materials, Inc. | Lift pin assembly |
US20110287631A1 (en) | 2010-05-12 | 2011-11-24 | Tokyo Electron Limited | Plasma processing apparatus and method of manufacturing semiconductor device |
USD650818S1 (en) * | 2008-12-19 | 2011-12-20 | Applied Materials, Inc. | Inner lift pin |
US8230931B2 (en) | 2009-12-29 | 2012-07-31 | Hydril Usa Manufacturing Llc | Lifting device and method for lifting a bonnet |
US20130333616A1 (en) | 2012-06-18 | 2013-12-19 | Tel Solar Ag | Plasma processing system with movable chamber housing parts |
US20140097175A1 (en) | 2008-08-08 | 2014-04-10 | Taiwan Semiconductor Manufacturing Company, Ltd. | Apparatus for Holding Semiconductor Wafers |
US10192770B2 (en) | 2014-10-03 | 2019-01-29 | Applied Materials, Inc. | Spring-loaded pins for susceptor assembly and processing methods using same |
US20190051555A1 (en) | 2017-08-08 | 2019-02-14 | Asm Ip Holding B.V. | Substrate lift mechanism and reactor including same |
US10262888B2 (en) | 2016-04-02 | 2019-04-16 | Applied Materials, Inc. | Apparatus and methods for wafer rotation in carousel susceptor |
US20190131167A1 (en) | 2017-10-27 | 2019-05-02 | Applied Materials, Inc. | Single Wafer Processing Environments With Spatial Separation |
-
2021
- 2021-03-02 US US29/772,523 patent/USD980884S1/en active Active
- 2021-09-02 TW TW110304619F patent/TWD221365S/en unknown
Patent Citations (38)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US3015709A (en) * | 1959-04-09 | 1962-01-02 | Ite Circuit Breaker Ltd | Cover lift pin |
JPS61214937A (en) | 1985-03-15 | 1986-09-24 | Canon Inc | Attractive holder |
US4790258A (en) | 1987-04-03 | 1988-12-13 | Tegal Corporation | Magnetically coupled wafer lift pins |
US5823153A (en) | 1997-05-08 | 1998-10-20 | Briggs & Stratton Corporation | Compressing release with snap-in components |
US6148762A (en) | 1998-02-17 | 2000-11-21 | Frontec Incorporated | Plasma processing apparatus |
US6032691A (en) | 1999-03-29 | 2000-03-07 | Kaylynn, Inc. | Valve assembly |
US6389677B1 (en) | 1999-03-30 | 2002-05-21 | Lam Research Corporation | Perimeter wafer lifting |
US7160392B2 (en) | 2000-07-20 | 2007-01-09 | Applied Materials, Inc. | Method for dechucking a substrate |
EP1174910A2 (en) | 2000-07-20 | 2002-01-23 | Applied Materials, Inc. | Method and apparatus for dechucking a substrate |
US6884319B2 (en) * | 2001-11-12 | 2005-04-26 | Jusung Engineering Co., Ltd. | Susceptor of apparatus for manufacturing semiconductor device |
US6550484B1 (en) | 2001-12-07 | 2003-04-22 | Novellus Systems, Inc. | Apparatus for maintaining wafer back side and edge exclusion during supercritical fluid processing |
USD504313S1 (en) * | 2002-02-20 | 2005-04-26 | Airbus Deutschland Gmbh | Lockbolt |
US7180283B2 (en) | 2002-07-17 | 2007-02-20 | Infineon Technologies, Ag | Wafer lifting device |
US20040045509A1 (en) * | 2002-09-10 | 2004-03-11 | Or David T. | Reduced friction lift pin |
US6887317B2 (en) | 2002-09-10 | 2005-05-03 | Applied Materials, Inc. | Reduced friction lift pin |
US20050194100A1 (en) | 2002-09-10 | 2005-09-08 | Applied Materials, Inc. | Reduced friction lift pin |
USD568914S1 (en) * | 2002-09-10 | 2008-05-13 | Applied Materials, Inc. | Substrate support lift pin |
US20050000453A1 (en) | 2003-06-02 | 2005-01-06 | Chul-Ju Hwang | Apparatus for semiconductor device and method using the same |
US7187188B2 (en) | 2003-12-24 | 2007-03-06 | Cascade Microtech, Inc. | Chuck with integrated wafer support |
US7292428B2 (en) | 2005-04-26 | 2007-11-06 | Applied Materials, Inc. | Electrostatic chuck with smart lift-pin mechanism for a plasma reactor |
US20070089672A1 (en) | 2005-09-30 | 2007-04-26 | Akinori Shimamura | Substrate placing mechanism |
CN100440476C (en) | 2005-09-30 | 2008-12-03 | 东京毅力科创株式会社 | Substrate placing mechanism and substrate processing device |
CN101352108A (en) | 2005-12-28 | 2009-01-21 | 夏普株式会社 | Stage apparatus and plasma processing apparatus |
US20100212832A1 (en) | 2005-12-28 | 2010-08-26 | Sharp Kabushiki Kaisha | Stage device and plasma treatment apparatus |
US20080134814A1 (en) * | 2006-12-11 | 2008-06-12 | Jong Sun Kim | Lift pin driving device and manufacturing apparatus having same |
KR20090132335A (en) | 2008-06-20 | 2009-12-30 | 세크론 주식회사 | Molding apparatus for semiconductor device |
US20140097175A1 (en) | 2008-08-08 | 2014-04-10 | Taiwan Semiconductor Manufacturing Company, Ltd. | Apparatus for Holding Semiconductor Wafers |
USD635597S1 (en) * | 2008-11-17 | 2011-04-05 | Applied Materials, Inc. | Lift pin |
USD640715S1 (en) * | 2008-11-17 | 2011-06-28 | Applied Materials, Inc. | Lift pin assembly |
USD650818S1 (en) * | 2008-12-19 | 2011-12-20 | Applied Materials, Inc. | Inner lift pin |
WO2010109373A2 (en) | 2009-03-24 | 2010-09-30 | Lam Research Corporation | Method and apparatus for reduction of voltage potential spike during dechucking |
US8230931B2 (en) | 2009-12-29 | 2012-07-31 | Hydril Usa Manufacturing Llc | Lifting device and method for lifting a bonnet |
US20110287631A1 (en) | 2010-05-12 | 2011-11-24 | Tokyo Electron Limited | Plasma processing apparatus and method of manufacturing semiconductor device |
US20130333616A1 (en) | 2012-06-18 | 2013-12-19 | Tel Solar Ag | Plasma processing system with movable chamber housing parts |
US10192770B2 (en) | 2014-10-03 | 2019-01-29 | Applied Materials, Inc. | Spring-loaded pins for susceptor assembly and processing methods using same |
US10262888B2 (en) | 2016-04-02 | 2019-04-16 | Applied Materials, Inc. | Apparatus and methods for wafer rotation in carousel susceptor |
US20190051555A1 (en) | 2017-08-08 | 2019-02-14 | Asm Ip Holding B.V. | Substrate lift mechanism and reactor including same |
US20190131167A1 (en) | 2017-10-27 | 2019-05-02 | Applied Materials, Inc. | Single Wafer Processing Environments With Spatial Separation |
Non-Patent Citations (1)
Title |
---|
"PCT International Search Report and Written Opinion in PCT/US2021/052564 dated Jan. 14, 2022, 11 pages". |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
USD1019463S1 (en) * | 2019-05-28 | 2024-03-26 | Louis Vuitton Malletier | Pin and the like |
USD1009817S1 (en) * | 2021-09-28 | 2024-01-02 | Applied Materials, Inc. | Shadow ring lift pin |
Also Published As
Publication number | Publication date |
---|---|
TWD221365S (en) | 2022-10-01 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
FEPP | Fee payment procedure |
Free format text: ENTITY STATUS SET TO UNDISCOUNTED (ORIGINAL EVENT CODE: BIG.); ENTITY STATUS OF PATENT OWNER: LARGE ENTITY |