JPH0244558Y2 - - Google Patents
Info
- Publication number
- JPH0244558Y2 JPH0244558Y2 JP10237087U JP10237087U JPH0244558Y2 JP H0244558 Y2 JPH0244558 Y2 JP H0244558Y2 JP 10237087 U JP10237087 U JP 10237087U JP 10237087 U JP10237087 U JP 10237087U JP H0244558 Y2 JPH0244558 Y2 JP H0244558Y2
- Authority
- JP
- Japan
- Prior art keywords
- negative pressure
- suction
- passages
- switching means
- circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001179 sorption measurement Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 description 10
- 238000010586 diagram Methods 0.000 description 6
- 238000001514 detection method Methods 0.000 description 1
Landscapes
- Jigs For Machine Tools (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10237087U JPH0244558Y2 (enrdf_load_stackoverflow) | 1987-07-03 | 1987-07-03 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP10237087U JPH0244558Y2 (enrdf_load_stackoverflow) | 1987-07-03 | 1987-07-03 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6413200U JPS6413200U (enrdf_load_stackoverflow) | 1989-01-24 |
JPH0244558Y2 true JPH0244558Y2 (enrdf_load_stackoverflow) | 1990-11-27 |
Family
ID=31332219
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP10237087U Expired JPH0244558Y2 (enrdf_load_stackoverflow) | 1987-07-03 | 1987-07-03 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0244558Y2 (enrdf_load_stackoverflow) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102363248A (zh) * | 2010-06-15 | 2012-02-29 | 株式会社Lg化学 | 膜卷切割系统的膜卷吸着装置 |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2636730B2 (ja) * | 1994-04-21 | 1997-07-30 | 日本電気株式会社 | プリント基板吸着装置 |
KR101113171B1 (ko) | 2010-02-25 | 2012-02-15 | 김성진 | 흡착 장치 |
JP5201642B2 (ja) * | 2011-07-19 | 2013-06-05 | 株式会社日本製鋼所 | 吸着装置および処理装置 |
CN114535841A (zh) * | 2022-02-28 | 2022-05-27 | 中钞印制技术研究院有限公司 | 承载平台和加工设备 |
-
1987
- 1987-07-03 JP JP10237087U patent/JPH0244558Y2/ja not_active Expired
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN102363248A (zh) * | 2010-06-15 | 2012-02-29 | 株式会社Lg化学 | 膜卷切割系统的膜卷吸着装置 |
Also Published As
Publication number | Publication date |
---|---|
JPS6413200U (enrdf_load_stackoverflow) | 1989-01-24 |
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