JPH0451814B2 - - Google Patents
Info
- Publication number
- JPH0451814B2 JPH0451814B2 JP62095859A JP9585987A JPH0451814B2 JP H0451814 B2 JPH0451814 B2 JP H0451814B2 JP 62095859 A JP62095859 A JP 62095859A JP 9585987 A JP9585987 A JP 9585987A JP H0451814 B2 JPH0451814 B2 JP H0451814B2
- Authority
- JP
- Japan
- Prior art keywords
- suction
- ventilation
- mat
- sheet
- vacuum
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Landscapes
- Holders For Sensitive Materials And Originals (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62095859A JPS63261249A (ja) | 1987-04-18 | 1987-04-18 | シ−ト状物の真空吸着装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP62095859A JPS63261249A (ja) | 1987-04-18 | 1987-04-18 | シ−ト状物の真空吸着装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS63261249A JPS63261249A (ja) | 1988-10-27 |
| JPH0451814B2 true JPH0451814B2 (enrdf_load_stackoverflow) | 1992-08-20 |
Family
ID=14149088
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP62095859A Granted JPS63261249A (ja) | 1987-04-18 | 1987-04-18 | シ−ト状物の真空吸着装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS63261249A (enrdf_load_stackoverflow) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2552197B2 (ja) * | 1990-08-27 | 1996-11-06 | 株式会社オーク製作所 | 自動露光装置および投入ステージ |
| EP1220036A1 (en) * | 1999-09-01 | 2002-07-03 | Sanei Giken Co., Ltd. | Substrate supporting table of exposure system |
| US6889967B2 (en) | 2002-09-27 | 2005-05-10 | Gerber Technology, Inc. | Perforated vacuum hold down surface |
| US20150030810A1 (en) * | 2012-02-17 | 2015-01-29 | Nitto Denko Corporation | Porous suction sheet and replaceable surface layer used therein |
| TWI613449B (zh) * | 2016-12-30 | 2018-02-01 | 致茂電子股份有限公司 | 吸附式測試裝置 |
Family Cites Families (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US3762816A (en) * | 1972-03-31 | 1973-10-02 | Western Blue Print Co | Photoreproduction apparatus with auxiliary film holder |
| JPS56145044U (enrdf_load_stackoverflow) * | 1980-03-31 | 1981-11-02 |
-
1987
- 1987-04-18 JP JP62095859A patent/JPS63261249A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS63261249A (ja) | 1988-10-27 |
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