JPS61187348A - 半導体装置の製造法 - Google Patents
半導体装置の製造法Info
- Publication number
- JPS61187348A JPS61187348A JP2655785A JP2655785A JPS61187348A JP S61187348 A JPS61187348 A JP S61187348A JP 2655785 A JP2655785 A JP 2655785A JP 2655785 A JP2655785 A JP 2655785A JP S61187348 A JPS61187348 A JP S61187348A
- Authority
- JP
- Japan
- Prior art keywords
- etching
- resist
- wiring
- film
- insulating film
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 8
- 239000004065 semiconductor Substances 0.000 title claims description 13
- 238000000034 method Methods 0.000 claims abstract description 79
- 229910052751 metal Inorganic materials 0.000 claims abstract description 64
- 239000002184 metal Substances 0.000 claims abstract description 64
- 238000005530 etching Methods 0.000 claims abstract description 63
- 230000015572 biosynthetic process Effects 0.000 claims abstract description 7
- 238000001312 dry etching Methods 0.000 claims description 7
- 238000012545 processing Methods 0.000 claims description 6
- 238000009413 insulation Methods 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract description 14
- 150000002500 ions Chemical class 0.000 abstract description 9
- 239000000758 substrate Substances 0.000 abstract description 9
- 229910052681 coesite Inorganic materials 0.000 abstract description 7
- 229910052906 cristobalite Inorganic materials 0.000 abstract description 7
- 239000000377 silicon dioxide Substances 0.000 abstract description 7
- 235000012239 silicon dioxide Nutrition 0.000 abstract description 7
- 229910052682 stishovite Inorganic materials 0.000 abstract description 7
- 229910052905 tridymite Inorganic materials 0.000 abstract description 7
- 230000008021 deposition Effects 0.000 abstract description 5
- 230000000149 penetrating effect Effects 0.000 abstract 1
- 239000010408 film Substances 0.000 description 66
- 239000010410 layer Substances 0.000 description 51
- 238000000151 deposition Methods 0.000 description 23
- 239000000463 material Substances 0.000 description 11
- 238000005516 engineering process Methods 0.000 description 9
- 238000000576 coating method Methods 0.000 description 6
- 239000011248 coating agent Substances 0.000 description 5
- 239000012528 membrane Substances 0.000 description 5
- 229920005989 resin Polymers 0.000 description 5
- 239000011347 resin Substances 0.000 description 5
- 239000010409 thin film Substances 0.000 description 5
- 229910021417 amorphous silicon Inorganic materials 0.000 description 4
- 239000011229 interlayer Substances 0.000 description 4
- 229910052721 tungsten Inorganic materials 0.000 description 4
- 101100536577 Caenorhabditis elegans cct-4 gene Proteins 0.000 description 3
- 241000282412 Homo Species 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000011109 contamination Methods 0.000 description 2
- 238000001035 drying Methods 0.000 description 2
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 2
- 239000010931 gold Substances 0.000 description 2
- 229910052737 gold Inorganic materials 0.000 description 2
- 230000010354 integration Effects 0.000 description 2
- 239000007769 metal material Substances 0.000 description 2
- 150000002739 metals Chemical class 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 238000001020 plasma etching Methods 0.000 description 2
- WFKWXMTUELFFGS-UHFFFAOYSA-N tungsten Chemical compound [W] WFKWXMTUELFFGS-UHFFFAOYSA-N 0.000 description 2
- 239000010937 tungsten Substances 0.000 description 2
- QTBSBXVTEAMEQO-UHFFFAOYSA-M Acetate Chemical compound CC([O-])=O QTBSBXVTEAMEQO-UHFFFAOYSA-M 0.000 description 1
- 241000272525 Anas platyrhynchos Species 0.000 description 1
- 229930091051 Arenine Natural products 0.000 description 1
- 101100152636 Caenorhabditis elegans cct-2 gene Proteins 0.000 description 1
- 241000284156 Clerodendrum quadriloculare Species 0.000 description 1
- 101000653567 Homo sapiens T-complex protein 1 subunit delta Proteins 0.000 description 1
- 239000004642 Polyimide Substances 0.000 description 1
- 102100029958 T-complex protein 1 subunit delta Human genes 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000010953 base metal Substances 0.000 description 1
- 238000004891 communication Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 210000004709 eyebrow Anatomy 0.000 description 1
- 238000011049 filling Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000007737 ion beam deposition Methods 0.000 description 1
- 238000001465 metallisation Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 229920001721 polyimide Polymers 0.000 description 1
- 229920005591 polysilicon Polymers 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 229920002050 silicone resin Polymers 0.000 description 1
- 238000005245 sintering Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
- 238000000427 thin-film deposition Methods 0.000 description 1
Landscapes
- Internal Circuitry In Semiconductor Integrated Circuit Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2655785A JPS61187348A (ja) | 1985-02-15 | 1985-02-15 | 半導体装置の製造法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2655785A JPS61187348A (ja) | 1985-02-15 | 1985-02-15 | 半導体装置の製造法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61187348A true JPS61187348A (ja) | 1986-08-21 |
| JPH0544181B2 JPH0544181B2 (enrdf_load_html_response) | 1993-07-05 |
Family
ID=12196832
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2655785A Granted JPS61187348A (ja) | 1985-02-15 | 1985-02-15 | 半導体装置の製造法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61187348A (enrdf_load_html_response) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58169939A (ja) * | 1982-03-31 | 1983-10-06 | Toshiba Corp | 半導体装置の製造方法 |
-
1985
- 1985-02-15 JP JP2655785A patent/JPS61187348A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58169939A (ja) * | 1982-03-31 | 1983-10-06 | Toshiba Corp | 半導体装置の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0544181B2 (enrdf_load_html_response) | 1993-07-05 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |