JPS61174783A - 超伝導回路装置の製造方法 - Google Patents
超伝導回路装置の製造方法Info
- Publication number
- JPS61174783A JPS61174783A JP60014425A JP1442585A JPS61174783A JP S61174783 A JPS61174783 A JP S61174783A JP 60014425 A JP60014425 A JP 60014425A JP 1442585 A JP1442585 A JP 1442585A JP S61174783 A JPS61174783 A JP S61174783A
- Authority
- JP
- Japan
- Prior art keywords
- superconducting
- layer
- insulating layer
- film
- superconducting layer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 12
- 238000000034 method Methods 0.000 claims abstract description 15
- 239000010410 layer Substances 0.000 abstract description 72
- 229910052758 niobium Inorganic materials 0.000 abstract description 8
- 239000010955 niobium Substances 0.000 abstract description 8
- GUCVJGMIXFAOAE-UHFFFAOYSA-N niobium atom Chemical compound [Nb] GUCVJGMIXFAOAE-UHFFFAOYSA-N 0.000 abstract description 8
- 239000000758 substrate Substances 0.000 abstract description 8
- 239000011229 interlayer Substances 0.000 abstract description 7
- 230000003647 oxidation Effects 0.000 abstract description 3
- 238000007254 oxidation reaction Methods 0.000 abstract description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 abstract 2
- 230000000903 blocking effect Effects 0.000 abstract 1
- 229910052681 coesite Inorganic materials 0.000 abstract 1
- 229910052906 cristobalite Inorganic materials 0.000 abstract 1
- 229910000484 niobium oxide Inorganic materials 0.000 abstract 1
- URLJKFSTXLNXLG-UHFFFAOYSA-N niobium(5+);oxygen(2-) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Nb+5].[Nb+5] URLJKFSTXLNXLG-UHFFFAOYSA-N 0.000 abstract 1
- 239000000377 silicon dioxide Substances 0.000 abstract 1
- 235000012239 silicon dioxide Nutrition 0.000 abstract 1
- 229910052682 stishovite Inorganic materials 0.000 abstract 1
- 229910052905 tridymite Inorganic materials 0.000 abstract 1
- 230000004888 barrier function Effects 0.000 description 6
- 238000000059 patterning Methods 0.000 description 4
- 238000001312 dry etching Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 210000004709 eyebrow Anatomy 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000012212 insulator Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 230000001590 oxidative effect Effects 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 239000002887 superconductor Substances 0.000 description 1
- 230000005641 tunneling Effects 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
- H10N60/0912—Manufacture or treatment of Josephson-effect devices
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60014425A JPS61174783A (ja) | 1985-01-30 | 1985-01-30 | 超伝導回路装置の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60014425A JPS61174783A (ja) | 1985-01-30 | 1985-01-30 | 超伝導回路装置の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS61174783A true JPS61174783A (ja) | 1986-08-06 |
| JPH0374512B2 JPH0374512B2 (enrdf_load_stackoverflow) | 1991-11-27 |
Family
ID=11860662
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60014425A Granted JPS61174783A (ja) | 1985-01-30 | 1985-01-30 | 超伝導回路装置の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS61174783A (enrdf_load_stackoverflow) |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58209183A (ja) * | 1982-05-31 | 1983-12-06 | Nec Corp | ジヨセフソン接合素子の製造方法 |
-
1985
- 1985-01-30 JP JP60014425A patent/JPS61174783A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS58209183A (ja) * | 1982-05-31 | 1983-12-06 | Nec Corp | ジヨセフソン接合素子の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0374512B2 (enrdf_load_stackoverflow) | 1991-11-27 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |