JPH0374512B2 - - Google Patents
Info
- Publication number
- JPH0374512B2 JPH0374512B2 JP60014425A JP1442585A JPH0374512B2 JP H0374512 B2 JPH0374512 B2 JP H0374512B2 JP 60014425 A JP60014425 A JP 60014425A JP 1442585 A JP1442585 A JP 1442585A JP H0374512 B2 JPH0374512 B2 JP H0374512B2
- Authority
- JP
- Japan
- Prior art keywords
- insulating layer
- superconducting
- layer
- wiring layer
- circuit device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
- H10N60/0912—Manufacture or treatment of Josephson-effect devices
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60014425A JPS61174783A (ja) | 1985-01-30 | 1985-01-30 | 超伝導回路装置の製造方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP60014425A JPS61174783A (ja) | 1985-01-30 | 1985-01-30 | 超伝導回路装置の製造方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS61174783A JPS61174783A (ja) | 1986-08-06 |
JPH0374512B2 true JPH0374512B2 (enrdf_load_stackoverflow) | 1991-11-27 |
Family
ID=11860662
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP60014425A Granted JPS61174783A (ja) | 1985-01-30 | 1985-01-30 | 超伝導回路装置の製造方法 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS61174783A (enrdf_load_stackoverflow) |
Family Cites Families (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS58209183A (ja) * | 1982-05-31 | 1983-12-06 | Nec Corp | ジヨセフソン接合素子の製造方法 |
-
1985
- 1985-01-30 JP JP60014425A patent/JPS61174783A/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS61174783A (ja) | 1986-08-06 |
Similar Documents
Publication | Publication Date | Title |
---|---|---|
JP3715502B2 (ja) | 半導体装置及びその製造方法 | |
JPH07114236B2 (ja) | 配線構造の製造方法 | |
JPS6146081A (ja) | ジヨセフソン接合素子の製造方法 | |
JPH0374512B2 (enrdf_load_stackoverflow) | ||
JP2508831B2 (ja) | 半導体装置 | |
JPS6239823B2 (enrdf_load_stackoverflow) | ||
JP2768294B2 (ja) | 半導体装置の製造方法 | |
JPH0856024A (ja) | 集積回路の製造方法 | |
JP2535539B2 (ja) | ジョセフソン回路の製造方法 | |
JPS61244078A (ja) | 超伝導線路の作製方法 | |
JPH05226475A (ja) | 半導体装置の製造方法 | |
JP3256977B2 (ja) | 半導体装置 | |
JP2981855B2 (ja) | 超伝導回路構造とその作製方法 | |
JPH11135629A (ja) | 半導体デバイスの配線構造並びにその形成方法 | |
JPH01289142A (ja) | 垂直配線構造 | |
JPH01140645A (ja) | 半導体集積回路装置の製造方法 | |
JP2937675B2 (ja) | 半導体装置の製造方法 | |
JPH03262118A (ja) | 半導体装置およびその製造方法 | |
JPS62115744A (ja) | 半導体装置 | |
JPS58125880A (ja) | ジヨセフソン接合素子 | |
JPH06124945A (ja) | 半導体基板への配線形成方法 | |
JPH08139185A (ja) | 半導体装置の製造方法 | |
JPH05166941A (ja) | 半導体セルフアライン・コンタクト構造および製造方法 | |
JPH05267470A (ja) | 集積回路装置およびその製造方法 | |
JPH0374514B2 (enrdf_load_stackoverflow) |
Legal Events
Date | Code | Title | Description |
---|---|---|---|
EXPY | Cancellation because of completion of term |