JPS61160924A - 半導体薄膜結晶層の製造方法 - Google Patents

半導体薄膜結晶層の製造方法

Info

Publication number
JPS61160924A
JPS61160924A JP87085A JP87085A JPS61160924A JP S61160924 A JPS61160924 A JP S61160924A JP 87085 A JP87085 A JP 87085A JP 87085 A JP87085 A JP 87085A JP S61160924 A JPS61160924 A JP S61160924A
Authority
JP
Japan
Prior art keywords
film
thin film
tungsten
insulating film
titanium
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP87085A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0236054B2 (enrdf_load_stackoverflow
Inventor
Iwao Higashinakagaha
東中川　巌
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP87085A priority Critical patent/JPS61160924A/ja
Publication of JPS61160924A publication Critical patent/JPS61160924A/ja
Publication of JPH0236054B2 publication Critical patent/JPH0236054B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02656—Special treatments
    • H01L21/02664—Aftertreatments
    • H01L21/02667—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth
    • H01L21/02689—Crystallisation or recrystallisation of non-monocrystalline semiconductor materials, e.g. regrowth using particle beams
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02436—Intermediate layers between substrates and deposited layers
    • H01L21/02439—Materials
    • H01L21/02488—Insulating materials
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
    • H01L21/02104—Forming layers
    • H01L21/02365—Forming inorganic semiconducting materials on a substrate
    • H01L21/02518—Deposited layers
    • H01L21/02521—Materials
    • H01L21/02524—Group 14 semiconducting materials
    • H01L21/02532—Silicon, silicon germanium, germanium

Landscapes

  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • General Physics & Mathematics (AREA)
  • Manufacturing & Machinery (AREA)
  • Computer Hardware Design (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Power Engineering (AREA)
  • Chemical & Material Sciences (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Recrystallisation Techniques (AREA)
JP87085A 1985-01-09 1985-01-09 半導体薄膜結晶層の製造方法 Granted JPS61160924A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP87085A JPS61160924A (ja) 1985-01-09 1985-01-09 半導体薄膜結晶層の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP87085A JPS61160924A (ja) 1985-01-09 1985-01-09 半導体薄膜結晶層の製造方法

Publications (2)

Publication Number Publication Date
JPS61160924A true JPS61160924A (ja) 1986-07-21
JPH0236054B2 JPH0236054B2 (enrdf_load_stackoverflow) 1990-08-15

Family

ID=11485702

Family Applications (1)

Application Number Title Priority Date Filing Date
JP87085A Granted JPS61160924A (ja) 1985-01-09 1985-01-09 半導体薄膜結晶層の製造方法

Country Status (1)

Country Link
JP (1) JPS61160924A (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6450410A (en) * 1987-08-21 1989-02-27 Agency Ind Science Techn Manufacture of semiconductor single crystal layer
JP2007042803A (ja) * 2005-08-02 2007-02-15 Honda Motor Co Ltd イオン注入マスクおよびその製造方法、並びにイオン注入マスクを用いた炭化珪素半導体装置およびその製造方法
KR101161456B1 (ko) * 2005-08-02 2012-07-02 신덴겐코교 가부시키가이샤 이온 주입 마스크 및 그 제조 방법과, 이온 주입 마스크를이용한 탄화규소 반도체 장치 및 그 제조 방법

Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5516425A (en) * 1978-07-21 1980-02-05 Toshiba Corp Semiconductor device
JPS5671954A (en) * 1979-11-19 1981-06-15 Seiko Epson Corp Mos type semiconductor device
JPS58139423A (ja) * 1982-02-15 1983-08-18 Fujitsu Ltd ラテラルエピタキシヤル成長法

Patent Citations (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5516425A (en) * 1978-07-21 1980-02-05 Toshiba Corp Semiconductor device
JPS5671954A (en) * 1979-11-19 1981-06-15 Seiko Epson Corp Mos type semiconductor device
JPS58139423A (ja) * 1982-02-15 1983-08-18 Fujitsu Ltd ラテラルエピタキシヤル成長法

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6450410A (en) * 1987-08-21 1989-02-27 Agency Ind Science Techn Manufacture of semiconductor single crystal layer
JP2007042803A (ja) * 2005-08-02 2007-02-15 Honda Motor Co Ltd イオン注入マスクおよびその製造方法、並びにイオン注入マスクを用いた炭化珪素半導体装置およびその製造方法
KR101161456B1 (ko) * 2005-08-02 2012-07-02 신덴겐코교 가부시키가이샤 이온 주입 마스크 및 그 제조 방법과, 이온 주입 마스크를이용한 탄화규소 반도체 장치 및 그 제조 방법

Also Published As

Publication number Publication date
JPH0236054B2 (enrdf_load_stackoverflow) 1990-08-15

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