JPS61151016A - フルオロシランの製造方法 - Google Patents

フルオロシランの製造方法

Info

Publication number
JPS61151016A
JPS61151016A JP27074484A JP27074484A JPS61151016A JP S61151016 A JPS61151016 A JP S61151016A JP 27074484 A JP27074484 A JP 27074484A JP 27074484 A JP27074484 A JP 27074484A JP S61151016 A JPS61151016 A JP S61151016A
Authority
JP
Japan
Prior art keywords
reaction
fluorosilane
chlorosilane
yield
produced
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP27074484A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0328370B2 (enExample
Inventor
Hiroyuki Momotake
宏之 百武
Yukihiro Yoda
與田　幸廣
Nobuhiko Koto
信彦 古藤
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsui Toatsu Chemicals Inc
Original Assignee
Mitsui Toatsu Chemicals Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsui Toatsu Chemicals Inc filed Critical Mitsui Toatsu Chemicals Inc
Priority to JP27074484A priority Critical patent/JPS61151016A/ja
Publication of JPS61151016A publication Critical patent/JPS61151016A/ja
Publication of JPH0328370B2 publication Critical patent/JPH0328370B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Silicon Compounds (AREA)
JP27074484A 1984-12-24 1984-12-24 フルオロシランの製造方法 Granted JPS61151016A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27074484A JPS61151016A (ja) 1984-12-24 1984-12-24 フルオロシランの製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27074484A JPS61151016A (ja) 1984-12-24 1984-12-24 フルオロシランの製造方法

Publications (2)

Publication Number Publication Date
JPS61151016A true JPS61151016A (ja) 1986-07-09
JPH0328370B2 JPH0328370B2 (enExample) 1991-04-18

Family

ID=17490368

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27074484A Granted JPS61151016A (ja) 1984-12-24 1984-12-24 フルオロシランの製造方法

Country Status (1)

Country Link
JP (1) JPS61151016A (enExample)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61232215A (ja) * 1985-04-09 1986-10-16 Central Glass Co Ltd 部分フツ素化シランの製造法
FR2594110A1 (fr) * 1986-02-13 1987-08-14 Central Glass Co Ltd Procede de preparation de perfluorosilanes a partir de perchlorosilanes et perfluorosilanes obtenus
EP0599278A1 (en) * 1992-11-27 1994-06-01 MITSUI TOATSU CHEMICALS, Inc. Process for the preparation of partially-substituted fluorosilane

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61232215A (ja) * 1985-04-09 1986-10-16 Central Glass Co Ltd 部分フツ素化シランの製造法
FR2594110A1 (fr) * 1986-02-13 1987-08-14 Central Glass Co Ltd Procede de preparation de perfluorosilanes a partir de perchlorosilanes et perfluorosilanes obtenus
EP0599278A1 (en) * 1992-11-27 1994-06-01 MITSUI TOATSU CHEMICALS, Inc. Process for the preparation of partially-substituted fluorosilane

Also Published As

Publication number Publication date
JPH0328370B2 (enExample) 1991-04-18

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