JPS6113929U - 気相成長装置 - Google Patents

気相成長装置

Info

Publication number
JPS6113929U
JPS6113929U JP9895784U JP9895784U JPS6113929U JP S6113929 U JPS6113929 U JP S6113929U JP 9895784 U JP9895784 U JP 9895784U JP 9895784 U JP9895784 U JP 9895784U JP S6113929 U JPS6113929 U JP S6113929U
Authority
JP
Japan
Prior art keywords
center
vapor phase
nozzle
support
phase growth
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP9895784U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0530350Y2 (cs
Inventor
伸夫 柏木
繁 鈴木
芳洋 宮之前
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shibaura Machine Co Ltd
Original Assignee
Toshiba Machine Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Toshiba Machine Co Ltd filed Critical Toshiba Machine Co Ltd
Priority to JP9895784U priority Critical patent/JPS6113929U/ja
Publication of JPS6113929U publication Critical patent/JPS6113929U/ja
Application granted granted Critical
Publication of JPH0530350Y2 publication Critical patent/JPH0530350Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
JP9895784U 1984-06-30 1984-06-30 気相成長装置 Granted JPS6113929U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9895784U JPS6113929U (ja) 1984-06-30 1984-06-30 気相成長装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9895784U JPS6113929U (ja) 1984-06-30 1984-06-30 気相成長装置

Publications (2)

Publication Number Publication Date
JPS6113929U true JPS6113929U (ja) 1986-01-27
JPH0530350Y2 JPH0530350Y2 (cs) 1993-08-03

Family

ID=30658476

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9895784U Granted JPS6113929U (ja) 1984-06-30 1984-06-30 気相成長装置

Country Status (1)

Country Link
JP (1) JPS6113929U (cs)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102560432B (zh) * 2010-12-13 2015-02-25 北京北方微电子基地设备工艺研究中心有限责任公司 一种基片承载装置及应用该装置的基片处理设备

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58142935A (ja) * 1982-02-19 1983-08-25 Toray Silicone Co Ltd プライマ−組成物

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS58142935A (ja) * 1982-02-19 1983-08-25 Toray Silicone Co Ltd プライマ−組成物

Also Published As

Publication number Publication date
JPH0530350Y2 (cs) 1993-08-03

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