JPS6113678A - ジヨセフソン接合素子の作製方法 - Google Patents
ジヨセフソン接合素子の作製方法Info
- Publication number
- JPS6113678A JPS6113678A JP59132925A JP13292584A JPS6113678A JP S6113678 A JPS6113678 A JP S6113678A JP 59132925 A JP59132925 A JP 59132925A JP 13292584 A JP13292584 A JP 13292584A JP S6113678 A JPS6113678 A JP S6113678A
- Authority
- JP
- Japan
- Prior art keywords
- film
- hole
- insulating film
- josephson junction
- geo
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000004519 manufacturing process Methods 0.000 title claims description 14
- 239000011229 interlayer Substances 0.000 claims abstract description 9
- 239000000463 material Substances 0.000 claims abstract description 6
- 238000000034 method Methods 0.000 claims description 19
- 229910000978 Pb alloy Inorganic materials 0.000 claims description 3
- 239000010408 film Substances 0.000 claims 2
- 238000009413 insulation Methods 0.000 claims 2
- 239000010409 thin film Substances 0.000 claims 2
- 239000000758 substrate Substances 0.000 abstract description 8
- 238000007493 shaping process Methods 0.000 abstract 1
- MVPPADPHJFYWMZ-UHFFFAOYSA-N chlorobenzene Chemical compound ClC1=CC=CC=C1 MVPPADPHJFYWMZ-UHFFFAOYSA-N 0.000 description 4
- 238000004544 sputter deposition Methods 0.000 description 4
- 238000010586 diagram Methods 0.000 description 3
- 239000010410 layer Substances 0.000 description 3
- 230000004888 barrier function Effects 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000007789 gas Substances 0.000 description 2
- 238000007654 immersion Methods 0.000 description 2
- 230000003647 oxidation Effects 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 239000002904 solvent Substances 0.000 description 2
- 229910001020 Au alloy Inorganic materials 0.000 description 1
- MYMOFIZGZYHOMD-UHFFFAOYSA-N Dioxygen Chemical compound O=O MYMOFIZGZYHOMD-UHFFFAOYSA-N 0.000 description 1
- 230000001133 acceleration Effects 0.000 description 1
- 239000007864 aqueous solution Substances 0.000 description 1
- 238000004380 ashing Methods 0.000 description 1
- FFBHFFJDDLITSX-UHFFFAOYSA-N benzyl N-[2-hydroxy-4-(3-oxomorpholin-4-yl)phenyl]carbamate Chemical compound OC1=C(NC(=O)OCC2=CC=CC=C2)C=CC(=C1)N1CCOCC1=O FFBHFFJDDLITSX-UHFFFAOYSA-N 0.000 description 1
- 244000309464 bull Species 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 230000008021 deposition Effects 0.000 description 1
- 229910001882 dioxygen Inorganic materials 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000001681 protective effect Effects 0.000 description 1
- 238000000992 sputter etching Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
- H10N60/0912—Manufacture or treatment of Josephson-effect devices
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Formation Of Insulating Films (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59132925A JPS6113678A (ja) | 1984-06-29 | 1984-06-29 | ジヨセフソン接合素子の作製方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59132925A JPS6113678A (ja) | 1984-06-29 | 1984-06-29 | ジヨセフソン接合素子の作製方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6113678A true JPS6113678A (ja) | 1986-01-21 |
| JPH0213466B2 JPH0213466B2 (enrdf_load_stackoverflow) | 1990-04-04 |
Family
ID=15092711
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59132925A Granted JPS6113678A (ja) | 1984-06-29 | 1984-06-29 | ジヨセフソン接合素子の作製方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6113678A (enrdf_load_stackoverflow) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS542542A (en) * | 1977-06-08 | 1979-01-10 | Hitachi Heating Appliance Co Ltd | High frequency heating device |
| JPS58212186A (ja) * | 1983-05-06 | 1983-12-09 | Hitachi Ltd | ジヨセフソン接合装置 |
-
1984
- 1984-06-29 JP JP59132925A patent/JPS6113678A/ja active Granted
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS542542A (en) * | 1977-06-08 | 1979-01-10 | Hitachi Heating Appliance Co Ltd | High frequency heating device |
| JPS58212186A (ja) * | 1983-05-06 | 1983-12-09 | Hitachi Ltd | ジヨセフソン接合装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0213466B2 (enrdf_load_stackoverflow) | 1990-04-04 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |