JPH0213466B2 - - Google Patents

Info

Publication number
JPH0213466B2
JPH0213466B2 JP59132925A JP13292584A JPH0213466B2 JP H0213466 B2 JPH0213466 B2 JP H0213466B2 JP 59132925 A JP59132925 A JP 59132925A JP 13292584 A JP13292584 A JP 13292584A JP H0213466 B2 JPH0213466 B2 JP H0213466B2
Authority
JP
Japan
Prior art keywords
film
forming
lift
geo
mask
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59132925A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6113678A (ja
Inventor
Koji Yamada
Hiroyuki Mori
Nobuo Myamoto
Shinichiro Yano
Mikio Hirano
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP59132925A priority Critical patent/JPS6113678A/ja
Publication of JPS6113678A publication Critical patent/JPS6113678A/ja
Publication of JPH0213466B2 publication Critical patent/JPH0213466B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0912—Manufacture or treatment of Josephson-effect devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
  • Formation Of Insulating Films (AREA)
JP59132925A 1984-06-29 1984-06-29 ジヨセフソン接合素子の作製方法 Granted JPS6113678A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59132925A JPS6113678A (ja) 1984-06-29 1984-06-29 ジヨセフソン接合素子の作製方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59132925A JPS6113678A (ja) 1984-06-29 1984-06-29 ジヨセフソン接合素子の作製方法

Publications (2)

Publication Number Publication Date
JPS6113678A JPS6113678A (ja) 1986-01-21
JPH0213466B2 true JPH0213466B2 (enrdf_load_stackoverflow) 1990-04-04

Family

ID=15092711

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59132925A Granted JPS6113678A (ja) 1984-06-29 1984-06-29 ジヨセフソン接合素子の作製方法

Country Status (1)

Country Link
JP (1) JPS6113678A (enrdf_load_stackoverflow)

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS542542A (en) * 1977-06-08 1979-01-10 Hitachi Heating Appliance Co Ltd High frequency heating device
JPS58212186A (ja) * 1983-05-06 1983-12-09 Hitachi Ltd ジヨセフソン接合装置

Also Published As

Publication number Publication date
JPS6113678A (ja) 1986-01-21

Similar Documents

Publication Publication Date Title
US4256816A (en) Mask structure for depositing patterned thin films
JPS6161280B2 (enrdf_load_stackoverflow)
JPS63234533A (ja) ジヨセフソン接合素子の形成方法
US4362598A (en) Method of patterning a thick resist layer of polymeric plastic
JPH0213466B2 (enrdf_load_stackoverflow)
JPS62195190A (ja) プレ−ナ型ジヨセフソン接合素子の形成法
JPH0554278B2 (enrdf_load_stackoverflow)
JPS6120334A (ja) 半導体装置の製造方法
JPS5961975A (ja) ジヨセフソン素子とその製造方法
Ono et al. Suspended metal mask techniques in Josephson junction fabrication
JPS6213832B2 (enrdf_load_stackoverflow)
JP2544478B2 (ja) ウエットエッチング方法
JPH0511432B2 (enrdf_load_stackoverflow)
JPH0145218B2 (enrdf_load_stackoverflow)
JP2973426B2 (ja) 微細パターンの形成方法
JPS60107876A (ja) ジヨセフソン素子の作製方法
JP2946102B2 (ja) パターン形成方法
JPH04192383A (ja) ジョセフソン接合素子のパターン形成方法
JPH0210589B2 (enrdf_load_stackoverflow)
JPH0532915B2 (enrdf_load_stackoverflow)
JPS6086834A (ja) パタ−ンの形成方法
JPH0448788A (ja) ジョセフソン接合素子のパターン形成方法
JPH04352479A (ja) ジョセフソン接合素子のパターン形成方法
JPH03233982A (ja) ジョセフソン接合素子のパターン形成方法
JPH01152775A (ja) ジョセフソン接合素子のパターン形成方法

Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term