JPH0554278B2 - - Google Patents
Info
- Publication number
- JPH0554278B2 JPH0554278B2 JP59004811A JP481184A JPH0554278B2 JP H0554278 B2 JPH0554278 B2 JP H0554278B2 JP 59004811 A JP59004811 A JP 59004811A JP 481184 A JP481184 A JP 481184A JP H0554278 B2 JPH0554278 B2 JP H0554278B2
- Authority
- JP
- Japan
- Prior art keywords
- film
- interlayer insulating
- forming
- insulating film
- vacuum chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000011229 interlayer Substances 0.000 claims description 29
- 239000000758 substrate Substances 0.000 claims description 18
- 239000011347 resin Substances 0.000 claims description 7
- 229920005989 resin Polymers 0.000 claims description 7
- 230000001681 protective effect Effects 0.000 claims description 5
- 239000002952 polymeric resin Substances 0.000 claims description 4
- 229920003002 synthetic resin Polymers 0.000 claims description 4
- 238000004519 manufacturing process Methods 0.000 claims description 3
- 238000000992 sputter etching Methods 0.000 description 12
- 239000010410 layer Substances 0.000 description 9
- 238000000034 method Methods 0.000 description 8
- 239000002184 metal Substances 0.000 description 6
- 229910052751 metal Inorganic materials 0.000 description 6
- 238000010438 heat treatment Methods 0.000 description 5
- 238000005530 etching Methods 0.000 description 4
- 238000004528 spin coating Methods 0.000 description 4
- 230000001133 acceleration Effects 0.000 description 3
- 239000000203 mixture Substances 0.000 description 3
- 238000004544 sputter deposition Methods 0.000 description 3
- 238000004380 ashing Methods 0.000 description 2
- 229920001721 polyimide Polymers 0.000 description 2
- 239000009719 polyimide resin Substances 0.000 description 2
- FXHOOIRPVKKKFG-UHFFFAOYSA-N N,N-Dimethylacetamide Chemical compound CN(C)C(C)=O FXHOOIRPVKKKFG-UHFFFAOYSA-N 0.000 description 1
- 239000004952 Polyamide Substances 0.000 description 1
- 229910004298 SiO 2 Inorganic materials 0.000 description 1
- 238000004140 cleaning Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000003822 epoxy resin Substances 0.000 description 1
- 150000003949 imides Chemical class 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 238000001020 plasma etching Methods 0.000 description 1
- 229920002647 polyamide Polymers 0.000 description 1
- 229920005668 polycarbonate resin Polymers 0.000 description 1
- 239000004431 polycarbonate resin Substances 0.000 description 1
- 229920000647 polyepoxide Polymers 0.000 description 1
- 239000002904 solvent Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10N60/00—Superconducting devices
- H10N60/01—Manufacture or treatment
- H10N60/0912—Manufacture or treatment of Josephson-effect devices
Landscapes
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Superconductor Devices And Manufacturing Methods Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59004811A JPS60149181A (ja) | 1984-01-17 | 1984-01-17 | 超電導多層配線の製造方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59004811A JPS60149181A (ja) | 1984-01-17 | 1984-01-17 | 超電導多層配線の製造方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60149181A JPS60149181A (ja) | 1985-08-06 |
| JPH0554278B2 true JPH0554278B2 (enrdf_load_stackoverflow) | 1993-08-12 |
Family
ID=11594126
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59004811A Granted JPS60149181A (ja) | 1984-01-17 | 1984-01-17 | 超電導多層配線の製造方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60149181A (enrdf_load_stackoverflow) |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5232900A (en) * | 1988-06-09 | 1993-08-03 | Superconductor Development Corporation | Superconductor structure |
| JP2630639B2 (ja) * | 1988-10-25 | 1997-07-16 | 宇部興産株式会社 | Ｎｂ系超電導体の積層ポリイミド材料 |
| JP2827572B2 (ja) * | 1991-05-24 | 1998-11-25 | 日本電気株式会社 | 層状超伝導体回路とその製造方法 |
| JP4711249B2 (ja) * | 2002-08-01 | 2011-06-29 | 独立行政法人産業技術総合研究所 | 超伝導集積回路及びその作製方法 |
| JP4822715B2 (ja) * | 2005-02-03 | 2011-11-24 | 国立大学法人埼玉大学 | 超伝導フォトン検出器 |
-
1984
- 1984-01-17 JP JP59004811A patent/JPS60149181A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60149181A (ja) | 1985-08-06 |
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