JPS60149181A - 超電導多層配線の製造方法 - Google Patents

超電導多層配線の製造方法

Info

Publication number
JPS60149181A
JPS60149181A JP59004811A JP481184A JPS60149181A JP S60149181 A JPS60149181 A JP S60149181A JP 59004811 A JP59004811 A JP 59004811A JP 481184 A JP481184 A JP 481184A JP S60149181 A JPS60149181 A JP S60149181A
Authority
JP
Japan
Prior art keywords
film
multilayer wiring
superconducting
manufacturing
superconducting multilayer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59004811A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0554278B2 (enrdf_load_stackoverflow
Inventor
Koji Yamada
宏治 山田
Yoshinobu Taruya
良信 樽谷
Juichi Nishino
西野　寿一
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP59004811A priority Critical patent/JPS60149181A/ja
Publication of JPS60149181A publication Critical patent/JPS60149181A/ja
Publication of JPH0554278B2 publication Critical patent/JPH0554278B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N60/00—Superconducting devices
    • H10N60/01—Manufacture or treatment
    • H10N60/0912—Manufacture or treatment of Josephson-effect devices

Landscapes

  • Engineering & Computer Science (AREA)
  • Manufacturing & Machinery (AREA)
  • Superconductor Devices And Manufacturing Methods Thereof (AREA)
JP59004811A 1984-01-17 1984-01-17 超電導多層配線の製造方法 Granted JPS60149181A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59004811A JPS60149181A (ja) 1984-01-17 1984-01-17 超電導多層配線の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59004811A JPS60149181A (ja) 1984-01-17 1984-01-17 超電導多層配線の製造方法

Publications (2)

Publication Number Publication Date
JPS60149181A true JPS60149181A (ja) 1985-08-06
JPH0554278B2 JPH0554278B2 (enrdf_load_stackoverflow) 1993-08-12

Family

ID=11594126

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59004811A Granted JPS60149181A (ja) 1984-01-17 1984-01-17 超電導多層配線の製造方法

Country Status (1)

Country Link
JP (1) JPS60149181A (enrdf_load_stackoverflow)

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02113937A (ja) * 1988-10-25 1990-04-26 Ube Ind Ltd Ｎｂ系超電導体の積層ポリイミド材料
JPH04346277A (ja) * 1991-05-24 1992-12-02 Nec Corp 層状超伝導体回路とその製造方法
US5232900A (en) * 1988-06-09 1993-08-03 Superconductor Development Corporation Superconductor structure
EP1387415A3 (en) * 2002-08-01 2006-05-31 National Institute of Advanced Industrial Science and Technology Superconducting integrated circuit and method for fabrication thereof
JP2006216795A (ja) * 2005-02-03 2006-08-17 Saitama Univ 超伝導フォトン検出器

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5232900A (en) * 1988-06-09 1993-08-03 Superconductor Development Corporation Superconductor structure
JPH02113937A (ja) * 1988-10-25 1990-04-26 Ube Ind Ltd Ｎｂ系超電導体の積層ポリイミド材料
JPH04346277A (ja) * 1991-05-24 1992-12-02 Nec Corp 層状超伝導体回路とその製造方法
EP1387415A3 (en) * 2002-08-01 2006-05-31 National Institute of Advanced Industrial Science and Technology Superconducting integrated circuit and method for fabrication thereof
US7323348B2 (en) 2002-08-01 2008-01-29 National Institute Of Advanced Industrial Science And Technology Superconducting integrated circuit and method for fabrication thereof
JP2006216795A (ja) * 2005-02-03 2006-08-17 Saitama Univ 超伝導フォトン検出器

Also Published As

Publication number Publication date
JPH0554278B2 (enrdf_load_stackoverflow) 1993-08-12

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