JPS6113114B2 - - Google Patents
Info
- Publication number
- JPS6113114B2 JPS6113114B2 JP54137945A JP13794579A JPS6113114B2 JP S6113114 B2 JPS6113114 B2 JP S6113114B2 JP 54137945 A JP54137945 A JP 54137945A JP 13794579 A JP13794579 A JP 13794579A JP S6113114 B2 JPS6113114 B2 JP S6113114B2
- Authority
- JP
- Japan
- Prior art keywords
- molecular pump
- bellows
- mirror body
- floor
- exhaust pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 11
- 230000005540 biological transmission Effects 0.000 description 3
- 230000001133 acceleration Effects 0.000 description 2
- 230000002238 attenuated effect Effects 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229910001220 stainless steel Inorganic materials 0.000 description 2
- 239000010935 stainless steel Substances 0.000 description 2
- 238000011109 contamination Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 239000010913 used oil Substances 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Vibration Prevention Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13794579A JPS5660895A (en) | 1979-10-25 | 1979-10-25 | Evacuation system of electron microscope |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13794579A JPS5660895A (en) | 1979-10-25 | 1979-10-25 | Evacuation system of electron microscope |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5660895A JPS5660895A (en) | 1981-05-26 |
| JPS6113114B2 true JPS6113114B2 (enrdf_load_stackoverflow) | 1986-04-11 |
Family
ID=15210369
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13794579A Granted JPS5660895A (en) | 1979-10-25 | 1979-10-25 | Evacuation system of electron microscope |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5660895A (enrdf_load_stackoverflow) |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006041113A1 (ja) * | 2004-10-15 | 2006-04-20 | Boc Edwards Japan Limited | ダンパおよび真空ポンプ |
| CN111115530A (zh) * | 2018-10-30 | 2020-05-08 | 楚天科技股份有限公司 | 一种瓶体称重装置 |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59154900U (ja) * | 1983-03-31 | 1984-10-17 | 株式会社島津製作所 | タ−ボ分子ポンプの据付構造 |
| JPS59221482A (ja) * | 1983-05-31 | 1984-12-13 | Akashi Seisakusho Co Ltd | 真空装置排気系の防振装置 |
| US5325893A (en) * | 1991-10-04 | 1994-07-05 | Tokushu Paper Mfg. Co., Ltd. | Air duct and paper therefor |
| JP5097823B2 (ja) * | 2008-06-05 | 2012-12-12 | 株式会社日立ハイテクノロジーズ | イオンビーム装置 |
-
1979
- 1979-10-25 JP JP13794579A patent/JPS5660895A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2006041113A1 (ja) * | 2004-10-15 | 2006-04-20 | Boc Edwards Japan Limited | ダンパおよび真空ポンプ |
| CN111115530A (zh) * | 2018-10-30 | 2020-05-08 | 楚天科技股份有限公司 | 一种瓶体称重装置 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5660895A (en) | 1981-05-26 |
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