JPS6113115B2 - - Google Patents
Info
- Publication number
- JPS6113115B2 JPS6113115B2 JP54137946A JP13794679A JPS6113115B2 JP S6113115 B2 JPS6113115 B2 JP S6113115B2 JP 54137946 A JP54137946 A JP 54137946A JP 13794679 A JP13794679 A JP 13794679A JP S6113115 B2 JPS6113115 B2 JP S6113115B2
- Authority
- JP
- Japan
- Prior art keywords
- molecular pump
- mirror body
- bellows
- exhaust pipe
- mirror
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- NJPPVKZQTLUDBO-UHFFFAOYSA-N novaluron Chemical compound C1=C(Cl)C(OC(F)(F)C(OC(F)(F)F)F)=CC=C1NC(=O)NC(=O)C1=C(F)C=CC=C1F NJPPVKZQTLUDBO-UHFFFAOYSA-N 0.000 claims description 7
- 230000000694 effects Effects 0.000 description 3
- 230000005540 biological transmission Effects 0.000 description 2
- 238000013016 damping Methods 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 230000002238 attenuated effect Effects 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000010913 used oil Substances 0.000 description 1
Landscapes
- Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
- Non-Positive Displacement Air Blowers (AREA)
- Vibration Prevention Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13794679A JPS5664195A (en) | 1979-10-25 | 1979-10-25 | Exhaust system in electron microscope or the like |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP13794679A JPS5664195A (en) | 1979-10-25 | 1979-10-25 | Exhaust system in electron microscope or the like |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS5664195A JPS5664195A (en) | 1981-06-01 |
| JPS6113115B2 true JPS6113115B2 (enrdf_load_stackoverflow) | 1986-04-11 |
Family
ID=15210394
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP13794679A Granted JPS5664195A (en) | 1979-10-25 | 1979-10-25 | Exhaust system in electron microscope or the like |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5664195A (enrdf_load_stackoverflow) |
Families Citing this family (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS59221482A (ja) * | 1983-05-31 | 1984-12-13 | Akashi Seisakusho Co Ltd | 真空装置排気系の防振装置 |
| JPS608490U (ja) * | 1983-06-30 | 1985-01-21 | アルバツク・クライオ株式会社 | 防振装置を備えたクライオポンプの固定装置 |
| JPS61294191A (ja) * | 1985-06-24 | 1986-12-24 | Seiko Seiki Co Ltd | タ−ボ分子ポンプの装着装置 |
| JPH0462441U (enrdf_load_stackoverflow) * | 1990-10-01 | 1992-05-28 | ||
| JP4190918B2 (ja) | 2003-03-11 | 2008-12-03 | シャープ株式会社 | 真空処理装置 |
| GB0402625D0 (en) * | 2004-02-06 | 2004-03-10 | Boc Group Plc | Vibration damper |
| JP2006077714A (ja) * | 2004-09-10 | 2006-03-23 | Boc Edwards Kk | ダンパ及び真空ポンプ |
-
1979
- 1979-10-25 JP JP13794679A patent/JPS5664195A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS5664195A (en) | 1981-06-01 |