JPS6314372Y2 - - Google Patents

Info

Publication number
JPS6314372Y2
JPS6314372Y2 JP1787782U JP1787782U JPS6314372Y2 JP S6314372 Y2 JPS6314372 Y2 JP S6314372Y2 JP 1787782 U JP1787782 U JP 1787782U JP 1787782 U JP1787782 U JP 1787782U JP S6314372 Y2 JPS6314372 Y2 JP S6314372Y2
Authority
JP
Japan
Prior art keywords
exhaust pipe
bellows
pump
elastic body
mirror
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1787782U
Other languages
English (en)
Japanese (ja)
Other versions
JPS58120554U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1787782U priority Critical patent/JPS58120554U/ja
Publication of JPS58120554U publication Critical patent/JPS58120554U/ja
Application granted granted Critical
Publication of JPS6314372Y2 publication Critical patent/JPS6314372Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Vibration Prevention Devices (AREA)
JP1787782U 1982-02-10 1982-02-10 電子顕微鏡等における排気系 Granted JPS58120554U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1787782U JPS58120554U (ja) 1982-02-10 1982-02-10 電子顕微鏡等における排気系

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1787782U JPS58120554U (ja) 1982-02-10 1982-02-10 電子顕微鏡等における排気系

Publications (2)

Publication Number Publication Date
JPS58120554U JPS58120554U (ja) 1983-08-17
JPS6314372Y2 true JPS6314372Y2 (enrdf_load_stackoverflow) 1988-04-22

Family

ID=30030154

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1787782U Granted JPS58120554U (ja) 1982-02-10 1982-02-10 電子顕微鏡等における排気系

Country Status (1)

Country Link
JP (1) JPS58120554U (enrdf_load_stackoverflow)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2654466B2 (ja) * 1991-06-07 1997-09-17 株式会社 半導体エネルギー研究所 反応性気体充填方法
JP4672204B2 (ja) * 2001-08-03 2011-04-20 エドワーズ株式会社 真空ポンプの接続構造及び真空ポンプ
JP6362941B2 (ja) * 2014-07-07 2018-07-25 株式会社日立ハイテクノロジーズ 荷電粒子線装置

Also Published As

Publication number Publication date
JPS58120554U (ja) 1983-08-17

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