JPS6231674Y2 - - Google Patents

Info

Publication number
JPS6231674Y2
JPS6231674Y2 JP1267683U JP1267683U JPS6231674Y2 JP S6231674 Y2 JPS6231674 Y2 JP S6231674Y2 JP 1267683 U JP1267683 U JP 1267683U JP 1267683 U JP1267683 U JP 1267683U JP S6231674 Y2 JPS6231674 Y2 JP S6231674Y2
Authority
JP
Japan
Prior art keywords
case
bellows
drive section
pump drive
cryopump
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1267683U
Other languages
English (en)
Japanese (ja)
Other versions
JPS59117891U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1267683U priority Critical patent/JPS59117891U/ja
Publication of JPS59117891U publication Critical patent/JPS59117891U/ja
Application granted granted Critical
Publication of JPS6231674Y2 publication Critical patent/JPS6231674Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Diaphragms And Bellows (AREA)
JP1267683U 1983-01-31 1983-01-31 クライオポンプの接続装置 Granted JPS59117891U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1267683U JPS59117891U (ja) 1983-01-31 1983-01-31 クライオポンプの接続装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1267683U JPS59117891U (ja) 1983-01-31 1983-01-31 クライオポンプの接続装置

Publications (2)

Publication Number Publication Date
JPS59117891U JPS59117891U (ja) 1984-08-09
JPS6231674Y2 true JPS6231674Y2 (enrdf_load_stackoverflow) 1987-08-13

Family

ID=30144072

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1267683U Granted JPS59117891U (ja) 1983-01-31 1983-01-31 クライオポンプの接続装置

Country Status (1)

Country Link
JP (1) JPS59117891U (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0781554B2 (ja) * 1989-01-20 1995-08-30 株式会社日立製作所 熱シールド板付クライオポンプ

Also Published As

Publication number Publication date
JPS59117891U (ja) 1984-08-09

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