JPS59117891U - クライオポンプの接続装置 - Google Patents

クライオポンプの接続装置

Info

Publication number
JPS59117891U
JPS59117891U JP1267683U JP1267683U JPS59117891U JP S59117891 U JPS59117891 U JP S59117891U JP 1267683 U JP1267683 U JP 1267683U JP 1267683 U JP1267683 U JP 1267683U JP S59117891 U JPS59117891 U JP S59117891U
Authority
JP
Japan
Prior art keywords
case
cryopump
drive unit
pump drive
connection device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1267683U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6231674Y2 (enrdf_load_stackoverflow
Inventor
岩槻　正志
平野　治男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP1267683U priority Critical patent/JPS59117891U/ja
Publication of JPS59117891U publication Critical patent/JPS59117891U/ja
Application granted granted Critical
Publication of JPS6231674Y2 publication Critical patent/JPS6231674Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Diaphragms And Bellows (AREA)
JP1267683U 1983-01-31 1983-01-31 クライオポンプの接続装置 Granted JPS59117891U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1267683U JPS59117891U (ja) 1983-01-31 1983-01-31 クライオポンプの接続装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1267683U JPS59117891U (ja) 1983-01-31 1983-01-31 クライオポンプの接続装置

Publications (2)

Publication Number Publication Date
JPS59117891U true JPS59117891U (ja) 1984-08-09
JPS6231674Y2 JPS6231674Y2 (enrdf_load_stackoverflow) 1987-08-13

Family

ID=30144072

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1267683U Granted JPS59117891U (ja) 1983-01-31 1983-01-31 クライオポンプの接続装置

Country Status (1)

Country Link
JP (1) JPS59117891U (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02191876A (ja) * 1989-01-20 1990-07-27 Hitachi Ltd 熱シールド板付クライオポンプ

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH02191876A (ja) * 1989-01-20 1990-07-27 Hitachi Ltd 熱シールド板付クライオポンプ

Also Published As

Publication number Publication date
JPS6231674Y2 (enrdf_load_stackoverflow) 1987-08-13

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