JPS643823Y2 - - Google Patents

Info

Publication number
JPS643823Y2
JPS643823Y2 JP1982051529U JP5152982U JPS643823Y2 JP S643823 Y2 JPS643823 Y2 JP S643823Y2 JP 1982051529 U JP1982051529 U JP 1982051529U JP 5152982 U JP5152982 U JP 5152982U JP S643823 Y2 JPS643823 Y2 JP S643823Y2
Authority
JP
Japan
Prior art keywords
bellows
cylindrical member
case
electron microscope
drive unit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982051529U
Other languages
English (en)
Japanese (ja)
Other versions
JPS58154880U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5152982U priority Critical patent/JPS58154880U/ja
Publication of JPS58154880U publication Critical patent/JPS58154880U/ja
Application granted granted Critical
Publication of JPS643823Y2 publication Critical patent/JPS643823Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Diaphragms And Bellows (AREA)
JP5152982U 1982-04-09 1982-04-09 電子顕微鏡等のクライオポンプ装置 Granted JPS58154880U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5152982U JPS58154880U (ja) 1982-04-09 1982-04-09 電子顕微鏡等のクライオポンプ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5152982U JPS58154880U (ja) 1982-04-09 1982-04-09 電子顕微鏡等のクライオポンプ装置

Publications (2)

Publication Number Publication Date
JPS58154880U JPS58154880U (ja) 1983-10-17
JPS643823Y2 true JPS643823Y2 (enrdf_load_stackoverflow) 1989-02-01

Family

ID=30062237

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5152982U Granted JPS58154880U (ja) 1982-04-09 1982-04-09 電子顕微鏡等のクライオポンプ装置

Country Status (1)

Country Link
JP (1) JPS58154880U (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55127191U (enrdf_load_stackoverflow) * 1979-03-05 1980-09-08

Also Published As

Publication number Publication date
JPS58154880U (ja) 1983-10-17

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