JPS58154880U - 電子顕微鏡等のクライオポンプ装置 - Google Patents

電子顕微鏡等のクライオポンプ装置

Info

Publication number
JPS58154880U
JPS58154880U JP5152982U JP5152982U JPS58154880U JP S58154880 U JPS58154880 U JP S58154880U JP 5152982 U JP5152982 U JP 5152982U JP 5152982 U JP5152982 U JP 5152982U JP S58154880 U JPS58154880 U JP S58154880U
Authority
JP
Japan
Prior art keywords
cryopump
case
drive unit
pump drive
bellows
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5152982U
Other languages
English (en)
Japanese (ja)
Other versions
JPS643823Y2 (enrdf_load_stackoverflow
Inventor
岩槻　正志
吉村　長光
平野　治男
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP5152982U priority Critical patent/JPS58154880U/ja
Publication of JPS58154880U publication Critical patent/JPS58154880U/ja
Application granted granted Critical
Publication of JPS643823Y2 publication Critical patent/JPS643823Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Diaphragms And Bellows (AREA)
JP5152982U 1982-04-09 1982-04-09 電子顕微鏡等のクライオポンプ装置 Granted JPS58154880U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5152982U JPS58154880U (ja) 1982-04-09 1982-04-09 電子顕微鏡等のクライオポンプ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5152982U JPS58154880U (ja) 1982-04-09 1982-04-09 電子顕微鏡等のクライオポンプ装置

Publications (2)

Publication Number Publication Date
JPS58154880U true JPS58154880U (ja) 1983-10-17
JPS643823Y2 JPS643823Y2 (enrdf_load_stackoverflow) 1989-02-01

Family

ID=30062237

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5152982U Granted JPS58154880U (ja) 1982-04-09 1982-04-09 電子顕微鏡等のクライオポンプ装置

Country Status (1)

Country Link
JP (1) JPS58154880U (enrdf_load_stackoverflow)

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55127191U (enrdf_load_stackoverflow) * 1979-03-05 1980-09-08

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS55127191U (enrdf_load_stackoverflow) * 1979-03-05 1980-09-08

Also Published As

Publication number Publication date
JPS643823Y2 (enrdf_load_stackoverflow) 1989-02-01

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