JPH0231587Y2 - - Google Patents

Info

Publication number
JPH0231587Y2
JPH0231587Y2 JP1982058295U JP5829582U JPH0231587Y2 JP H0231587 Y2 JPH0231587 Y2 JP H0231587Y2 JP 1982058295 U JP1982058295 U JP 1982058295U JP 5829582 U JP5829582 U JP 5829582U JP H0231587 Y2 JPH0231587 Y2 JP H0231587Y2
Authority
JP
Japan
Prior art keywords
vibration isolating
block
cryopump
electron microscope
valve driving
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982058295U
Other languages
English (en)
Japanese (ja)
Other versions
JPS58161181U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP5829582U priority Critical patent/JPS58161181U/ja
Publication of JPS58161181U publication Critical patent/JPS58161181U/ja
Application granted granted Critical
Publication of JPH0231587Y2 publication Critical patent/JPH0231587Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Electron Tubes For Measurement (AREA)
JP5829582U 1982-04-21 1982-04-21 クライオポンプ装置 Granted JPS58161181U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5829582U JPS58161181U (ja) 1982-04-21 1982-04-21 クライオポンプ装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP5829582U JPS58161181U (ja) 1982-04-21 1982-04-21 クライオポンプ装置

Publications (2)

Publication Number Publication Date
JPS58161181U JPS58161181U (ja) 1983-10-27
JPH0231587Y2 true JPH0231587Y2 (enrdf_load_stackoverflow) 1990-08-27

Family

ID=30068692

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5829582U Granted JPS58161181U (ja) 1982-04-21 1982-04-21 クライオポンプ装置

Country Status (1)

Country Link
JP (1) JPS58161181U (enrdf_load_stackoverflow)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE2829137C2 (de) * 1978-07-03 1982-09-16 Th. Goldschmidt Ag, 4300 Essen Verwendung von 1.3-Di-n-decyl-2-methyl-imidazoliumchlorid oder -bromid als Mikrobicide

Also Published As

Publication number Publication date
JPS58161181U (ja) 1983-10-27

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