JPS58120554U - 電子顕微鏡等における排気系 - Google Patents

電子顕微鏡等における排気系

Info

Publication number
JPS58120554U
JPS58120554U JP1787782U JP1787782U JPS58120554U JP S58120554 U JPS58120554 U JP S58120554U JP 1787782 U JP1787782 U JP 1787782U JP 1787782 U JP1787782 U JP 1787782U JP S58120554 U JPS58120554 U JP S58120554U
Authority
JP
Japan
Prior art keywords
exhaust pipe
pump
elastic body
exhaust system
electron microscopes
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1787782U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6314372Y2 (enrdf_load_stackoverflow
Inventor
公郎 大井
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd filed Critical Jeol Ltd
Priority to JP1787782U priority Critical patent/JPS58120554U/ja
Publication of JPS58120554U publication Critical patent/JPS58120554U/ja
Application granted granted Critical
Publication of JPS6314372Y2 publication Critical patent/JPS6314372Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Vibration Prevention Devices (AREA)
  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP1787782U 1982-02-10 1982-02-10 電子顕微鏡等における排気系 Granted JPS58120554U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1787782U JPS58120554U (ja) 1982-02-10 1982-02-10 電子顕微鏡等における排気系

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1787782U JPS58120554U (ja) 1982-02-10 1982-02-10 電子顕微鏡等における排気系

Publications (2)

Publication Number Publication Date
JPS58120554U true JPS58120554U (ja) 1983-08-17
JPS6314372Y2 JPS6314372Y2 (enrdf_load_stackoverflow) 1988-04-22

Family

ID=30030154

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1787782U Granted JPS58120554U (ja) 1982-02-10 1982-02-10 電子顕微鏡等における排気系

Country Status (1)

Country Link
JP (1) JPS58120554U (enrdf_load_stackoverflow)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06342759A (ja) * 1991-06-07 1994-12-13 Semiconductor Energy Lab Co Ltd 反応性気体充填方法
JP2003049771A (ja) * 2001-08-03 2003-02-21 Boc Edwards Technologies Ltd 真空ポンプの接続構造及び真空ポンプ
JP2016018621A (ja) * 2014-07-07 2016-02-01 株式会社日立ハイテクノロジーズ 荷電粒子線装置

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH06342759A (ja) * 1991-06-07 1994-12-13 Semiconductor Energy Lab Co Ltd 反応性気体充填方法
JP2003049771A (ja) * 2001-08-03 2003-02-21 Boc Edwards Technologies Ltd 真空ポンプの接続構造及び真空ポンプ
JP2016018621A (ja) * 2014-07-07 2016-02-01 株式会社日立ハイテクノロジーズ 荷電粒子線装置

Also Published As

Publication number Publication date
JPS6314372Y2 (enrdf_load_stackoverflow) 1988-04-22

Similar Documents

Publication Publication Date Title
JPS58120554U (ja) 電子顕微鏡等における排気系
JPS6028298U (ja) タ−ボ分子ポンプ
JPS5843099U (ja) 補聴器
JPS6039266U (ja) イオンレ−ザ管
JPS60107483U (ja) 配管支持装置
JPS5856134U (ja) 排気ブレ−キ装置
JPS6099377U (ja) 配管支持装置
JPS58112742U (ja) 車両用油圧式クラツチレリ−ズ系の防振構造
JPS5915945U (ja) 圧力伝達機構
JPS588776U (ja) 昇圧機
JPS59139936U (ja) ベロフラム式真空スイツチ
JPS5921091U (ja) 圧縮機の振動防止装置
JPS59147393U (ja) エツジ構造
JPS58111314U (ja) 排気装置用支持具
JPS58107560U (ja) 電子顕微鏡の排気装置
JPS5842909U (ja) プランジヤ−・ソレノイド
JPS59434U (ja) 陶磁器の被施「あ」物の押え針を無針にする台座
JPS6114284U (ja) 複合管
JPS5967590U (ja) 高真空排気装置
JPS6110169U (ja) 綿棒
JPS5940700U (ja) 配管装置
JPS58131409U (ja) カンチレバ−
JPS6015647U (ja) 圧力計用導管構造
JPH0736196U (ja) Ｗメガホン
JPS591300U (ja) セラミツクスピ−カ−