JPS5664195A - Exhaust system in electron microscope or the like - Google Patents

Exhaust system in electron microscope or the like

Info

Publication number
JPS5664195A
JPS5664195A JP13794679A JP13794679A JPS5664195A JP S5664195 A JPS5664195 A JP S5664195A JP 13794679 A JP13794679 A JP 13794679A JP 13794679 A JP13794679 A JP 13794679A JP S5664195 A JPS5664195 A JP S5664195A
Authority
JP
Japan
Prior art keywords
electron microscope
molecular pump
closed type
back pressure
air spring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13794679A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6113115B2 (enrdf_load_stackoverflow
Inventor
Hiroyuki Kitajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP13794679A priority Critical patent/JPS5664195A/ja
Publication of JPS5664195A publication Critical patent/JPS5664195A/ja
Publication of JPS6113115B2 publication Critical patent/JPS6113115B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Vibration Prevention Devices (AREA)
JP13794679A 1979-10-25 1979-10-25 Exhaust system in electron microscope or the like Granted JPS5664195A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13794679A JPS5664195A (en) 1979-10-25 1979-10-25 Exhaust system in electron microscope or the like

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13794679A JPS5664195A (en) 1979-10-25 1979-10-25 Exhaust system in electron microscope or the like

Publications (2)

Publication Number Publication Date
JPS5664195A true JPS5664195A (en) 1981-06-01
JPS6113115B2 JPS6113115B2 (enrdf_load_stackoverflow) 1986-04-11

Family

ID=15210394

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13794679A Granted JPS5664195A (en) 1979-10-25 1979-10-25 Exhaust system in electron microscope or the like

Country Status (1)

Country Link
JP (1) JPS5664195A (enrdf_load_stackoverflow)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59221482A (ja) * 1983-05-31 1984-12-13 Akashi Seisakusho Co Ltd 真空装置排気系の防振装置
JPS608490U (ja) * 1983-06-30 1985-01-21 アルバツク・クライオ株式会社 防振装置を備えたクライオポンプの固定装置
JPS61294191A (ja) * 1985-06-24 1986-12-24 Seiko Seiki Co Ltd タ−ボ分子ポンプの装着装置
JPH0462441U (enrdf_load_stackoverflow) * 1990-10-01 1992-05-28
WO2005078288A1 (en) * 2004-02-06 2005-08-25 The Boc Group Plc Vibration damper
JP2006077714A (ja) * 2004-09-10 2006-03-23 Boc Edwards Kk ダンパ及び真空ポンプ
US7879149B2 (en) 2003-03-11 2011-02-01 Sharp Kabushiki Kaisha Vacuum processing apparatus

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59221482A (ja) * 1983-05-31 1984-12-13 Akashi Seisakusho Co Ltd 真空装置排気系の防振装置
JPS608490U (ja) * 1983-06-30 1985-01-21 アルバツク・クライオ株式会社 防振装置を備えたクライオポンプの固定装置
JPS61294191A (ja) * 1985-06-24 1986-12-24 Seiko Seiki Co Ltd タ−ボ分子ポンプの装着装置
JPH0462441U (enrdf_load_stackoverflow) * 1990-10-01 1992-05-28
US7879149B2 (en) 2003-03-11 2011-02-01 Sharp Kabushiki Kaisha Vacuum processing apparatus
WO2005078288A1 (en) * 2004-02-06 2005-08-25 The Boc Group Plc Vibration damper
JP2006077714A (ja) * 2004-09-10 2006-03-23 Boc Edwards Kk ダンパ及び真空ポンプ

Also Published As

Publication number Publication date
JPS6113115B2 (enrdf_load_stackoverflow) 1986-04-11

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