JPS5664195A - Exhaust system in electron microscope or the like - Google Patents

Exhaust system in electron microscope or the like

Info

Publication number
JPS5664195A
JPS5664195A JP13794679A JP13794679A JPS5664195A JP S5664195 A JPS5664195 A JP S5664195A JP 13794679 A JP13794679 A JP 13794679A JP 13794679 A JP13794679 A JP 13794679A JP S5664195 A JPS5664195 A JP S5664195A
Authority
JP
Japan
Prior art keywords
electron microscope
molecular pump
closed type
back pressure
air spring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP13794679A
Other languages
Japanese (ja)
Other versions
JPS6113115B2 (en
Inventor
Hiroyuki Kitajima
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jeol Ltd
Original Assignee
Jeol Ltd
Nihon Denshi KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jeol Ltd, Nihon Denshi KK filed Critical Jeol Ltd
Priority to JP13794679A priority Critical patent/JPS5664195A/en
Publication of JPS5664195A publication Critical patent/JPS5664195A/en
Publication of JPS6113115B2 publication Critical patent/JPS6113115B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
  • Vibration Prevention Devices (AREA)

Abstract

PURPOSE: To prevent resolution of an electron microscope from degradation by a mechanism for cancelling back pressure received by a molecular pump through an annular closed type air spring to damp vibration of the molecular pump by a bellows or closed type spring.
CONSTITUTION: When a pressure plate 15 is pressed downward by compressed air introduced under a predetermined pressure from a compressor 22 in the upper chamber 20a side of three cylinders 12a fixed to a main exhaust pipe 6 through a mounting plate 13, the interior of a bodytube 1 of a transmission type electron microscope is evacuated. Thus, since back pressure received by a molecular pump 8 through an annular closed type air spring 18 is structually cancelled, the back pressure can be cancelled by the evacuation of the bodytube 1. Also, since vibration of the molecular pump 8 can be damped by a bellows 10 and closed type air spring 18, resolution of the electron microscope can be prevented from degradation.
COPYRIGHT: (C)1981,JPO&Japio
JP13794679A 1979-10-25 1979-10-25 Exhaust system in electron microscope or the like Granted JPS5664195A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13794679A JPS5664195A (en) 1979-10-25 1979-10-25 Exhaust system in electron microscope or the like

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13794679A JPS5664195A (en) 1979-10-25 1979-10-25 Exhaust system in electron microscope or the like

Publications (2)

Publication Number Publication Date
JPS5664195A true JPS5664195A (en) 1981-06-01
JPS6113115B2 JPS6113115B2 (en) 1986-04-11

Family

ID=15210394

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13794679A Granted JPS5664195A (en) 1979-10-25 1979-10-25 Exhaust system in electron microscope or the like

Country Status (1)

Country Link
JP (1) JPS5664195A (en)

Cited By (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59221482A (en) * 1983-05-31 1984-12-13 Akashi Seisakusho Co Ltd Vibration proofing device for exhaust system of vacuum device
JPS608490U (en) * 1983-06-30 1985-01-21 アルバツク・クライオ株式会社 Cryopump fixing device with vibration isolator
JPS61294191A (en) * 1985-06-24 1986-12-24 Seiko Seiki Co Ltd Fitting device of turbo molecular pump
JPH0462441U (en) * 1990-10-01 1992-05-28
WO2005078288A1 (en) * 2004-02-06 2005-08-25 The Boc Group Plc Vibration damper
JP2006077714A (en) * 2004-09-10 2006-03-23 Boc Edwards Kk Damper and vacuum pump
US7879149B2 (en) 2003-03-11 2011-02-01 Sharp Kabushiki Kaisha Vacuum processing apparatus

Cited By (8)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS59221482A (en) * 1983-05-31 1984-12-13 Akashi Seisakusho Co Ltd Vibration proofing device for exhaust system of vacuum device
JPS608490U (en) * 1983-06-30 1985-01-21 アルバツク・クライオ株式会社 Cryopump fixing device with vibration isolator
JPH0346234Y2 (en) * 1983-06-30 1991-09-30
JPS61294191A (en) * 1985-06-24 1986-12-24 Seiko Seiki Co Ltd Fitting device of turbo molecular pump
JPH0462441U (en) * 1990-10-01 1992-05-28
US7879149B2 (en) 2003-03-11 2011-02-01 Sharp Kabushiki Kaisha Vacuum processing apparatus
WO2005078288A1 (en) * 2004-02-06 2005-08-25 The Boc Group Plc Vibration damper
JP2006077714A (en) * 2004-09-10 2006-03-23 Boc Edwards Kk Damper and vacuum pump

Also Published As

Publication number Publication date
JPS6113115B2 (en) 1986-04-11

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