JPS5518084A - Exhaust system for corpuscular ray apparatus - Google Patents
Exhaust system for corpuscular ray apparatusInfo
- Publication number
- JPS5518084A JPS5518084A JP9187378A JP9187378A JPS5518084A JP S5518084 A JPS5518084 A JP S5518084A JP 9187378 A JP9187378 A JP 9187378A JP 9187378 A JP9187378 A JP 9187378A JP S5518084 A JPS5518084 A JP S5518084A
- Authority
- JP
- Japan
- Prior art keywords
- pump
- mirror body
- exhaust
- vibration
- exhaust pipe
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Electron Beam Exposure (AREA)
Abstract
PURPOSE: To absorb the vibration of a molecular pump and raise the accuracy of exposure when the gas in the mirror body of a corpuscular ray apparatus is removed by the molecular pump, by providing a buffer tank between the mirror body and the pump.
CONSTITUTION: A converging lens 2 and an electron gun chamber 3 are provided over a sample chamber 1 whose bottom is connected to an ionic pump, thereby forming the mirror body. The mirror body is mounted on a vibration-proof unit 4 on a base 5. A rough exhaust pipe 6 is connected to the sample chamber 1, the converging lens 2 and the electron gun chamber 3. An accessory exhaust pipe 18a is connected to the sample chamber. These exhaust pipes 6, 18a are coupled to an exhaust pipe 9. The buffer tank 8 is supported on a vibration-proof unit 11 on a base plate 12. The buffer tank 8 and a bellows 19a are provided between the exhaust pipes 9, 18a, 6. The gas in the mirror body is removed through the exhaust pipe 9 by the molecular pump 10 equipped with an oil revolution pump 14. The vibration of the pump 10 is prevented from being transmitted to the mirror body. Preparatory exhaust by the pump 14 is not needed. Therefore, the exhaust time is shortened.
COPYRIGHT: (C)1980,JPO&Japio
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9187378A JPS5518084A (en) | 1978-07-27 | 1978-07-27 | Exhaust system for corpuscular ray apparatus |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9187378A JPS5518084A (en) | 1978-07-27 | 1978-07-27 | Exhaust system for corpuscular ray apparatus |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS5518084A true JPS5518084A (en) | 1980-02-07 |
Family
ID=14038669
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9187378A Pending JPS5518084A (en) | 1978-07-27 | 1978-07-27 | Exhaust system for corpuscular ray apparatus |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS5518084A (en) |
Cited By (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0095369A2 (en) * | 1982-05-24 | 1983-11-30 | Varian Associates, Inc. | Air lock vacuum pumping methods and apparatus |
| JPS58221529A (en) * | 1982-06-18 | 1983-12-23 | Nec Corp | Radio selective call receiver provided with display function |
| JPS59226994A (en) * | 1983-06-09 | 1984-12-20 | 日本電気株式会社 | Wireless selective call receiver |
| JPS62110244A (en) * | 1985-11-08 | 1987-05-21 | Hitachi Ltd | Vacuum exhauster |
| JPH01276554A (en) * | 1988-04-28 | 1989-11-07 | Teru Barian Kk | Semiconductor manufacturing device |
| JPH0287451A (en) * | 1988-09-22 | 1990-03-28 | Jeol Ltd | Exhaust system of electron microscope |
| JPH09213256A (en) * | 1997-01-20 | 1997-08-15 | Hitachi Ltd | Electric beam inspection device |
| JPH09219171A (en) * | 1997-01-20 | 1997-08-19 | Hitachi Ltd | Electron beam inspection device |
-
1978
- 1978-07-27 JP JP9187378A patent/JPS5518084A/en active Pending
Cited By (9)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| EP0095369A2 (en) * | 1982-05-24 | 1983-11-30 | Varian Associates, Inc. | Air lock vacuum pumping methods and apparatus |
| JPS58221529A (en) * | 1982-06-18 | 1983-12-23 | Nec Corp | Radio selective call receiver provided with display function |
| JPH041538B2 (en) * | 1982-06-18 | 1992-01-13 | Nippon Electric Co | |
| JPS59226994A (en) * | 1983-06-09 | 1984-12-20 | 日本電気株式会社 | Wireless selective call receiver |
| JPS62110244A (en) * | 1985-11-08 | 1987-05-21 | Hitachi Ltd | Vacuum exhauster |
| JPH01276554A (en) * | 1988-04-28 | 1989-11-07 | Teru Barian Kk | Semiconductor manufacturing device |
| JPH0287451A (en) * | 1988-09-22 | 1990-03-28 | Jeol Ltd | Exhaust system of electron microscope |
| JPH09213256A (en) * | 1997-01-20 | 1997-08-15 | Hitachi Ltd | Electric beam inspection device |
| JPH09219171A (en) * | 1997-01-20 | 1997-08-19 | Hitachi Ltd | Electron beam inspection device |
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