JPS53964A - Electron beam diaphragm in electron microscope and similar instruments - Google Patents

Electron beam diaphragm in electron microscope and similar instruments

Info

Publication number
JPS53964A
JPS53964A JP7431076A JP7431076A JPS53964A JP S53964 A JPS53964 A JP S53964A JP 7431076 A JP7431076 A JP 7431076A JP 7431076 A JP7431076 A JP 7431076A JP S53964 A JPS53964 A JP S53964A
Authority
JP
Japan
Prior art keywords
electron
similar instruments
beam diaphragm
vacuum
electron beam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP7431076A
Other languages
Japanese (ja)
Inventor
Yoshimasa Unno
Motohide Ukiana
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP7431076A priority Critical patent/JPS53964A/en
Publication of JPS53964A publication Critical patent/JPS53964A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: To reduce potential such as gas discharge, vacuum leak etc. by unifying the vacuum seal constructing the diaphragm in vacuum to move along X, Y axes by means of a shaft inserted from outside of vacuum.
COPYRIGHT: (C)1978,JPO&Japio
JP7431076A 1976-06-25 1976-06-25 Electron beam diaphragm in electron microscope and similar instruments Pending JPS53964A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP7431076A JPS53964A (en) 1976-06-25 1976-06-25 Electron beam diaphragm in electron microscope and similar instruments

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP7431076A JPS53964A (en) 1976-06-25 1976-06-25 Electron beam diaphragm in electron microscope and similar instruments

Publications (1)

Publication Number Publication Date
JPS53964A true JPS53964A (en) 1978-01-07

Family

ID=13543417

Family Applications (1)

Application Number Title Priority Date Filing Date
JP7431076A Pending JPS53964A (en) 1976-06-25 1976-06-25 Electron beam diaphragm in electron microscope and similar instruments

Country Status (1)

Country Link
JP (1) JPS53964A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62147583U (en) * 1986-03-10 1987-09-18
WO2019083037A1 (en) 2017-10-26 2019-05-02 古河電気工業株式会社 Carbon nanotube composite wire, carbon nanotube-coated electric wire, and wire harness, robot wiring, and overhead line

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS62147583U (en) * 1986-03-10 1987-09-18
JPH0541916Y2 (en) * 1986-03-10 1993-10-22
WO2019083037A1 (en) 2017-10-26 2019-05-02 古河電気工業株式会社 Carbon nanotube composite wire, carbon nanotube-coated electric wire, and wire harness, robot wiring, and overhead line

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