JPS535962A - Electron microscope - Google Patents
Electron microscopeInfo
- Publication number
- JPS535962A JPS535962A JP8050676A JP8050676A JPS535962A JP S535962 A JPS535962 A JP S535962A JP 8050676 A JP8050676 A JP 8050676A JP 8050676 A JP8050676 A JP 8050676A JP S535962 A JPS535962 A JP S535962A
- Authority
- JP
- Japan
- Prior art keywords
- throttle plate
- electron microscope
- supporting part
- insulated
- body tube
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE: The throttle plate insulated from a body tube is supported by a still more insulated supporting part, and the discharge is performed between the throttle plate and the supporting part to blow off the dirt on the throttle plate, thereby cleaning the throttle plate without the throttle plate removed from the body tube of an electron microscope.
COPYRIGHT: (C)1978,JPO&Japio
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8050676A JPS535962A (en) | 1976-07-06 | 1976-07-06 | Electron microscope |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8050676A JPS535962A (en) | 1976-07-06 | 1976-07-06 | Electron microscope |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS535962A true JPS535962A (en) | 1978-01-19 |
Family
ID=13720189
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8050676A Pending JPS535962A (en) | 1976-07-06 | 1976-07-06 | Electron microscope |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS535962A (en) |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5691364A (en) * | 1979-12-22 | 1981-07-24 | Fujitsu Ltd | Aperture of electron beam device |
JPS5987742A (en) * | 1982-11-11 | 1984-05-21 | Seiko Instr & Electronics Ltd | Lens for charged particle |
JP2009187852A (en) * | 2008-02-08 | 2009-08-20 | Hitachi High-Technologies Corp | Charged particle beam processing apparatus |
-
1976
- 1976-07-06 JP JP8050676A patent/JPS535962A/en active Pending
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5691364A (en) * | 1979-12-22 | 1981-07-24 | Fujitsu Ltd | Aperture of electron beam device |
JPS5987742A (en) * | 1982-11-11 | 1984-05-21 | Seiko Instr & Electronics Ltd | Lens for charged particle |
JPH0332852B2 (en) * | 1982-11-11 | 1991-05-15 | Seiko Instr & Electronics | |
JP2009187852A (en) * | 2008-02-08 | 2009-08-20 | Hitachi High-Technologies Corp | Charged particle beam processing apparatus |
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