JPS535962A - Electron microscope - Google Patents

Electron microscope

Info

Publication number
JPS535962A
JPS535962A JP8050676A JP8050676A JPS535962A JP S535962 A JPS535962 A JP S535962A JP 8050676 A JP8050676 A JP 8050676A JP 8050676 A JP8050676 A JP 8050676A JP S535962 A JPS535962 A JP S535962A
Authority
JP
Japan
Prior art keywords
throttle plate
electron microscope
supporting part
insulated
body tube
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP8050676A
Other languages
Japanese (ja)
Inventor
Shizuya Matsuura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP8050676A priority Critical patent/JPS535962A/en
Publication of JPS535962A publication Critical patent/JPS535962A/en
Pending legal-status Critical Current

Links

Abstract

PURPOSE: The throttle plate insulated from a body tube is supported by a still more insulated supporting part, and the discharge is performed between the throttle plate and the supporting part to blow off the dirt on the throttle plate, thereby cleaning the throttle plate without the throttle plate removed from the body tube of an electron microscope.
COPYRIGHT: (C)1978,JPO&Japio
JP8050676A 1976-07-06 1976-07-06 Electron microscope Pending JPS535962A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP8050676A JPS535962A (en) 1976-07-06 1976-07-06 Electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP8050676A JPS535962A (en) 1976-07-06 1976-07-06 Electron microscope

Publications (1)

Publication Number Publication Date
JPS535962A true JPS535962A (en) 1978-01-19

Family

ID=13720189

Family Applications (1)

Application Number Title Priority Date Filing Date
JP8050676A Pending JPS535962A (en) 1976-07-06 1976-07-06 Electron microscope

Country Status (1)

Country Link
JP (1) JPS535962A (en)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5691364A (en) * 1979-12-22 1981-07-24 Fujitsu Ltd Aperture of electron beam device
JPS5987742A (en) * 1982-11-11 1984-05-21 Seiko Instr & Electronics Ltd Lens for charged particle
JP2009187852A (en) * 2008-02-08 2009-08-20 Hitachi High-Technologies Corp Charged particle beam processing apparatus

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5691364A (en) * 1979-12-22 1981-07-24 Fujitsu Ltd Aperture of electron beam device
JPS5987742A (en) * 1982-11-11 1984-05-21 Seiko Instr & Electronics Ltd Lens for charged particle
JPH0332852B2 (en) * 1982-11-11 1991-05-15 Seiko Instr & Electronics
JP2009187852A (en) * 2008-02-08 2009-08-20 Hitachi High-Technologies Corp Charged particle beam processing apparatus

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